Surface emitting laser, surface emitting laser array, optical scanning device, image forming apparatus, optical transmission module and optical transmission system
First Claim
1. A surface emitting laser comprising:
- an oscillator structure including an active layer;
semiconductor distribution Bragg reflectors each including plural pairs of a low refractive index layer and a high refractive index layer, the semiconductor distribution Bragg reflectors sandwiching the oscillator structure; and
a confined structure formed of a selectively-oxidized layer including aluminum, whereinthe selectively-oxidized layer is included as a part of the low refractive index layer of the semiconductor distribution Bragg reflector;
the low refractive index layer including the selectively-oxidized layer includes first and second layers, the first layer being in contact with at least one side of the selectively-oxidized layer, the second layer being in contact with the first layer; and
Al content rate in the first layer is lower than the Al content rate in the selectively-oxidized layer and is greater than the Al content rate in the second layer.
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Accused Products
Abstract
A disclosed surface emitting laser is capable of being manufactured easily, having a higher yield and a longer service lifetime. In the surface emitting laser, a selectively-oxidized layer is included as a part of a low refractive index layer of an upper semiconductor distribution Bragg reflector; the low refractive index layer including the selectively-oxidized layer includes two intermediate layers adjoining the selectively-oxidized layer and two low refractive index layers adjoining the intermediate layers. Al content rate in the intermediate layers is lower than that in the selectively-oxidized layer, and Al content rate in the low refractive index layers is lower than that in the selectively-oxidized layer. This configuration enables providing more control over the thickness and oxidation rate of the oxidized layer, thereby enabling reducing the variation of the thickness of the oxidized layer.
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Citations
20 Claims
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1. A surface emitting laser comprising:
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an oscillator structure including an active layer; semiconductor distribution Bragg reflectors each including plural pairs of a low refractive index layer and a high refractive index layer, the semiconductor distribution Bragg reflectors sandwiching the oscillator structure; and a confined structure formed of a selectively-oxidized layer including aluminum, wherein the selectively-oxidized layer is included as a part of the low refractive index layer of the semiconductor distribution Bragg reflector; the low refractive index layer including the selectively-oxidized layer includes first and second layers, the first layer being in contact with at least one side of the selectively-oxidized layer, the second layer being in contact with the first layer; and Al content rate in the first layer is lower than the Al content rate in the selectively-oxidized layer and is greater than the Al content rate in the second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 17, 18, 19, 20)
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8. A surface emitting laser emitting a light in the direction perpendicular to its substrate, the surface emitting laser comprising:
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an oscillator structure including an active layer; semiconductor distribution Bragg reflectors each including plural pairs of a low refractive index layer and a high refractive index layer, the semiconductor distribution Bragg reflectors sandwiching the oscillator structure; and a current confined structure in which a current passage region is surrounded by an oxidized layer, the current confined structure being formed in the semiconductor distribution Bragg reflector by selectively oxidizing aluminum, wherein the oxidized layer includes first and second boundary surfaces, the first boundary surface is provided at one side closer to the active layer, and the second boundary surface is provided on the other side, a thickness of the oxidized layer gradually decreases as the distance to the current passage region decreases, and the second boundary surface is more inclined than the first boundary surface with respect to a virtual surface perpendicular to a laser light emitting direction. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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Specification