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Drive frequency tunable MEMS gyroscope

  • US 8,210,038 B2
  • Filed: 02/17/2009
  • Issued: 07/03/2012
  • Est. Priority Date: 02/17/2009
  • Status: Active Grant
First Claim
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1. A sensor device comprising:

  • a mass;

    a mass drive component configured to drive the mass within a plane along an oscillation axis;

    a plurality of non-linear springs supporting the mass;

    a first tuner operably connected to the plurality of non-linear springs and configured to modify the stress condition of the plurality of non-linear springs in response to a trim voltage by generating a force along the oscillation axis; and

    a trim circuit electrically coupled with the first tuner for providing the trim voltage.

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