Semiconductor device packages with electromagnetic interference shielding
First Claim
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1. A semiconductor device package, comprising:
- a substrate unit including an upper surface, a lower surface, a lateral surface disposed adjacent to a periphery of the substrate unit and fully extending between the upper surface and the lower surface of the substrate unit, and a grounding element disposed adjacent to the periphery of the substrate unit and at least partially extending between the upper surface and the lower surface of the substrate unit, the grounding element including an indented portion that is disposed adjacent to the lateral surface of the substrate unit;
a semiconductor device electrically connected to the substrate unit;
a package body disposed adjacent to the upper surface of the substrate unit and encapsulating the semiconductor device, the package body including exterior surfaces that include a lateral surface; and
an electromagnetic interference shield disposed adjacent to the exterior surfaces of the package body and the lateral surface of the substrate unit, the electromagnetic interference shield being electrically connected to the grounding element;
wherein the grounding element includes a connection surface that is inwardly recessed relative to the lateral surface of the substrate unit, and the electromagnetic interference shield conformally coats the connection surface.
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Abstract
Described herein are semiconductor device packages with EMI shielding and related methods. In one embodiment, a semiconductor device package includes a grounding element disposed adjacent to a periphery of a substrate unit and at least partially extending between an upper surface and a lower surface of the substrate unit. The grounding element includes an indented portion that is disposed adjacent to a lateral surface of the substrate unit. The semiconductor device package also includes an EMI shield that is electrically connected to the grounding element and is inwardly recessed adjacent to the indented portion of the grounding element.
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Citations
20 Claims
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1. A semiconductor device package, comprising:
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a substrate unit including an upper surface, a lower surface, a lateral surface disposed adjacent to a periphery of the substrate unit and fully extending between the upper surface and the lower surface of the substrate unit, and a grounding element disposed adjacent to the periphery of the substrate unit and at least partially extending between the upper surface and the lower surface of the substrate unit, the grounding element including an indented portion that is disposed adjacent to the lateral surface of the substrate unit; a semiconductor device electrically connected to the substrate unit; a package body disposed adjacent to the upper surface of the substrate unit and encapsulating the semiconductor device, the package body including exterior surfaces that include a lateral surface; and an electromagnetic interference shield disposed adjacent to the exterior surfaces of the package body and the lateral surface of the substrate unit, the electromagnetic interference shield being electrically connected to the grounding element; wherein the grounding element includes a connection surface that is inwardly recessed relative to the lateral surface of the substrate unit, and the electromagnetic interference shield conformally coats the connection surface. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor device package, comprising:
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a substrate unit including an upper surface, a lower surface, a lateral surface disposed adjacent to a periphery of the substrate unit and fully extending between the upper surface and the lower surface of the substrate unit, and a grounding element disposed adjacent to the periphery of the substrate unit and at least partially extending between the upper surface and the lower surface of the substrate unit, the grounding element including an indented portion that is disposed adjacent to the lateral surface of the substrate unit; a semiconductor device electrically connected to the substrate unit; a package body disposed adjacent to the upper surface of the substrate unit and encapsulating the semiconductor device, the package body including exterior surfaces that include a lateral surface; and an electromagnetic interference shield disposed adjacent to the exterior surfaces of the package body and the lateral surface of the substrate unit, the electromagnetic interference shield being electrically connected to the grounding element; wherein the grounding element partially extends between the upper surface and the lower surface of the substrate unit, such that a height of the grounding element is less than a thickness of the substrate unit; and wherein the substrate unit includes a pair of internal grounding layers, and the grounding element extends between the pair of internal grounding layers. - View Dependent Claims (7)
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8. A semiconductor device package, comprising:
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a substrate including a first surface, a second opposing surface, and a grounding element at least partially extending between the first surface and the second opposing surface of the substrate, the grounding element including a plated channel remnant and a filler member, the plated channel remnant being inwardly recessed so as to accommodate the filler member, the plated channel remnant and the filler member defining a lateral surface of the grounding element that is disposed adjacent to a periphery of the substrate; a semiconductor device electrically connected to the substrate; a package body disposed adjacent to the first surface of the substrate and encapsulating the semiconductor device, the package body including exterior surfaces; and an electromagnetic interference shield disposed adjacent to the exterior surfaces of the package body and electrically connected to the lateral surface of the grounding element, wherein a lateral profile of the semiconductor device package is substantially planar and is substantially orthogonal with respect to the second opposing surface of the substrate; wherein the lateral surface of the grounding element is substantially planar. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17. A semiconductor package, comprising:
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a substrate including a lateral surface and a grounding element including a partial annular portion recessed from the lateral surface of the substrate and a filler material disposed in a recess defined by the partial annular portion, wherein the partial annular portion has at least one sidewall exposed; a package body disposed adjacent to an upper surface of the substrate, the package body including exterior surfaces that include a lateral surface; and a shielding layer disposed adjacent to the exterior surfaces of the package body and the lateral surface of the substrate, wherein the shielding layer is physically connected to the at least one sidewall of the partial annular portion; wherein the partial annular portion and the filler material define a lateral surface of the grounding element that is disposed adjacent to the lateral surface of the substrate, and that is substantially planar. - View Dependent Claims (18, 19, 20)
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Specification