MEMS stiction testing apparatus and method

• US 8,215,151 B2
• Filed: 06/24/2009
• Issued: 07/10/2012
• Est. Priority Date: 06/26/2008
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Sammoura, Firas N., Sawyer, William, Yang, Kuang L.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US12/490,573
• Publication Number:
  US 20090320557A1
• Time in Patent Office: 1,112 Days
• Field of Search: 73/13.8, 73/13.9, 73/9, 731/04, 735/143.2, 324/548
• US Class Current: 73/1.38
• CPC Class Codes: B81C 99/0045 End test of the packaged device

Abstract

A MEMS stiction testing method applies a first electrical signal to a MEMS device having two opposing surfaces to cause the two opposing surfaces to make physical contact. The two opposing surfaces produce a second electrical signal when in physical contact. The method then substantially mitigates the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value.

Claims

1. A MEMS stiction testing method comprising:

measuring the capacitance between the two opposing surfaces of a MEMS device prior to applying a first electrical signal;

applying the first electrical signal to the MEMS device, the first electrical signal causing the two opposing surfaces to make physical contact, the two opposing surfaces producing a second electrical signal when in physical contact;

monitoring the second electrical signal;

substantially mitigating the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value;

measuring the capacitance between the two opposing surfaces after substantially mitigating the first electrical signal; and

comparing the capacitance measurement from after substantially mitigating the first electrical signal with the capacitance measurement from prior to applying the first electrical signal.

2. The method as defined by claim 1 wherein applying the first electrical signal to the MEMS devices comprises applying the first electrical signal to the MEMS device in a stepped manner.

3. The method as defined by claim 1 wherein substantially mitigating comprises one of:

completely turning off the first electrical signal;

or

reducing the first electrical signal in a stepped manner.

4. The method as defined by claim 1 wherein the opposed surfaces separate at a given signal level while mitigating the first electrical signal, the method further comprising at least one of:

monitoring the second electrical signal to detect when the second electrical signal has reached a prescribed value indicative of surface separation;

or

recording the given signal level.

5. The method as defined by claim 1 wherein the first electrical signal is a voltage, and the second electrical signal is a current.

6. The method as defined by claim 1 wherein the prescribed maximum value is between about 300 and 700 pico-amps.

7. The method as defined by claim 1 wherein the two opposing surfaces form a variable capacitor.

8. The method as defined by claim 1 wherein the MEMS device includes at least one of:

a high-G MEMS inertial sensor;

a low-G MEMS inertial sensor;

or

a MEMS microphone.

9. A MEMS stiction testing apparatus comprising:

a signal generator configured to provide a first electrical signal that when applied to a MEMS device having two opposing surfaces causes the two opposing surfaces to make physical contact, the two opposing surfaces producing a second electrical signal when in physical contact; and

a signal monitor configured to measure the capacitance between the two opposing surfaces prior to the signal generator applying the first electrical signal, monitor the second electrical signal, substantially mitigate the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value, measure the capacitance between the two opposing surfaces after substantially mitigating the first electrical signal, and compare the capacitance measurement from after substantially mitigating the first electrical signal with the capacitance measurement from prior to applying the first electrical signal.

10. The apparatus as defined by claim 9 wherein the signal generator is configured to provide the first electrical signal in a stepped manner.

11. The apparatus as defined by claim 9 wherein the signal monitor is configured to substantially mitigate the first electrical signal by one of:

completely turning off the first electrical signal;

or

reducing the first electrical signal in a stepped manner.

12. The apparatus as defined by claim 9 wherein the opposed surfaces separate at a given signal level while mitigating the first electrical signal, and wherein the signal monitor is further configured to at least one of:

monitor the second electrical signal to detect when the second electrical signal has reached a prescribed value indicative of surface separation;

or

record the given signal level.

13. The apparatus as defined by claim 9 wherein the first electrical signal is a voltage, and the second electrical signal is a current.

14. The apparatus as defined by claim 9 wherein the prescribed maximum value is between about 300 and 700 pico-amps.

15. The apparatus as defined by claim 9 wherein the two opposing surfaces form a variable capacitor.

16. The apparatus as defined by claim 9 wherein the apparatus is a programmable parametric analyzer.

17. The apparatus as defined by claim 9 wherein the MEMS device includes at least one of:

a high-G MEMS inertial sensor;

a low-G MEMS inertial sensor;

or

a MEMS microphone.

18. A computer program product for use on a computer system for MEMS stiction testing, the computer program product comprising a tangible non-transitory computer usable medium having computer readable program code thereon, the computer readable program code comprising:

program code for instructing a computer system for MEMS stiction testing to measure the capacitance between two opposing surfaces of a MEMS device prior to applying a first electrical signal;

program code for instructing the computer system to apply the first electrical signal to MEMS device, the electrical signal causing the two opposing surfaces to make physical contact, the two opposing surfaces producing a second electrical signal when in physical contact;

program code for instructing the computer system to monitor the second electrical signal;

program code for instructing the computer system to substantially mitigate the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value;

program code for instructing the computer system to measure the capacitance between the two opposing surfaces after substantially mitigating the first electrical signal; and

program code for instructing the computer system to compare the capacitance measurement from after substantially mitigating the first electrical signal with the capacitance measurement from prior to applying the first electrical signal.