Gap maintenance for opening to process chamber

• US 8,216,380 B2
• Filed: 01/08/2009
• Issued: 07/10/2012
• Est. Priority Date: 01/08/2009
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: White, Carl L., Shero, Eric, Reed, Joe
• Primary Examiner(s): MACARTHUR, SYLVIA
• Application Number:
  US12/350,793
• Publication Number:
  US 20100173432A1
• Time in Patent Office: 1,279 Days
• Field of Search: 118/712, 118/729, 257/E21.531, 438/17
• US Class Current: 118/729
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/4585 Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
• CPC Class Codes: H01L 21/67011 Apparatus for manufacture or treatment processes H01L21/30, H01L21/46; for production or after-treatment of single crystals or homogeneous polycrystalline material C30B35/00
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/68771 characterised by supporting more than one semiconductor substrate

Abstract

A semiconductor processing apparatus includes a reaction chamber, a movable susceptor, a movement element, and a control system. The reaction chamber includes a baseplate. The baseplate includes an opening. The movable susceptor is configured to hold a workpiece. The movable element is configured to move a workpiece held on the susceptor towards the opening of the baseplate. The control system is configured to space the susceptor from the baseplate by an unsealed gap during processing of a workpiece in the reaction chamber. Purge gases may flow through the gap into the reaction chamber. Methods of maintaining the gap during processing include calibrating the height of pads and capacitance measurements when the susceptor is spaced from the baseplate.

Claims

1. A semiconductor processing apparatus comprising:

a reaction chamber comprising a baseplate including an opening;

a movable susceptor configured to hold a workpiece;

a movement element configured to move a workpiece held on the susceptor towards the opening of the baseplate; and

a control system configured to space the susceptor from the baseplate by an unsealed gap during processing of a workpiece in the reaction chamber.

2. The apparatus of claim 1, wherein gap has a thickness of at least about 0.001 inches (approximately 25 μ

m).

3. The apparatus of claim 1, further comprising a plurality of PolyBenzlmidazole pads configured to space the susceptor from the baseplate, the gap comprising a vertical gap beneath the baseplate.

4. The apparatus of claim 3, wherein the gap is generally annular between the pads.

5. The apparatus of claim 3, wherein the pads are connected to a lower surface of the baseplate and are configured to contact a peripheral edge of the susceptor during processing of a workpiece.

6. The apparatus of claim 3, wherein the pads are connected to a peripheral edge of the susceptor and are configured to contact a lower surface of the baseplate during processing of a workpiece.

7. The apparatus of claim 3, wherein each of the plurality of pads has an adjustable height.

8. The apparatus of claim 3, wherein the plurality of pads comprises at least three pads.

9. The apparatus of claim 3, wherein the baseplate comprises titanium.

10. The apparatus of claim 1, wherein the baseplate comprises a first conductive surface, wherein the susceptor comprises a second conductive surface, the apparatus further comprising a capacitance measurement device configured to measure capacitance between the first conductive surface and the second conductive surface.

11. The apparatus of claim 1, further comprising a loading chamber below the reaction chamber, the loading chamber in fluid communication with the reaction chamber through the gap during processing of a workpiece in the reaction chamber.

12. The apparatus of claim 1, wherein the susceptor is dimensioned to pass through the opening and wherein the gap comprises an annular horizontal gap substantially surrounding the susceptor.

13. The apparatus of claim 1, wherein the reaction chamber comprises a cross-flow atomic layer deposition reactor.

14. A method of processing a semiconductor workpiece, the method comprising:

loading a semiconductor workpiece onto a movable susceptor;

moving the susceptor towards an opening in a baseplate of a reaction chamber;

stopping movement of the susceptor when the susceptor is in a processing position, the susceptor spaced from the baseplate by an unsealed gap in the processing position; and

processing the workpiece in the processing position while maintaining the gap.

15. The method of claim 14, wherein loading the workpiece is performed in a loading chamber and wherein processing the workpiece comprises maintaining a higher pressure in the loading chamber than in the processing chamber.

16. The method of claim 15, wherein the pressure is between about 0.1 Torr (approximately 13 Pa) and about 5 Torr (approximately 667 Pa) higher in the loading chamber than in the reaction chamber.

17. The method of claim 15, wherein maintaining the higher pressure comprising flowing nitrogen into the loading chamber during processing.

18. The method of claim 17, wherein flowing the nitrogen is at between about 0 sccm and about 200 sccm.

19. The method of claim 14, wherein stopping moving comprises contacting a plurality of PolyBenzlmidazole pads between the baseplate and the susceptor.

20. The method of claim 14, wherein the baseplate comprises a first conductive surface and the susceptor comprises a second conductive surface, wherein moving the susceptor comprises measuring a capacitance between the first conductive surface and the second conductive surface, and wherein stopping moving comprises indicating that the measured capacitance is proximate to a predetermined value.

21. The method of claim 14, wherein processing the workpiece comprises atomic layer deposition.

22. The method of claim 14, further comprising calibrating the movement element to stop when the susceptor is in the processing position.

23. The method of claim 22, wherein calibrating the movement element comprises:

resting the baseplate face down;

draping a plurality of shims across the opening of the baseplate;

centering the susceptor with the opening of the baseplate;

placing the susceptor face down into the opening of the baseplate;

turning an adjusting screw until a pad of the susceptor contacts the baseplate; and

holding the adjusting screw in place while tightening a jam nut.

24. The method of claim 22, wherein calibrating the movement element comprises:

moving the susceptor towards the opening, the susceptor including a first conductive surface and the baseplate including a second conductive surface;

measuring a capacitance between the first conductive surface and the second conductive surface; and

configuring the movement element to stop moving the susceptor when the measured capacitance indicates that the susceptor is spaced from the baseplate by an unsealed gap having desired dimensions.

25. The method of claim 22, wherein calibrating the movement element comprises:

loading a calibration workpiece onto the movable susceptor;

moving the susceptor towards the opening, the calibration workpiece including a first conductive surface and the baseplate including a second conductive surface;

measuring a capacitance between the first conductive surface and the second conductive surface;

configuring the movement element to stop moving the susceptor when the measured capacitance indicates that the susceptor is spaced from the baseplate by an unsealed gap having desired dimensions; and

unloading the calibration workpiece.