Temperature control apparatus, processing apparatus, and temperature control method
First Claim
1. A temperature control apparatus comprising:
- a resistance heater whose resistance value changes depending on a temperature of the resistance heater;
a signal generator to output a control signal having two voltage levels including a first-voltage and a second-voltage which is different from the first-voltage;
an adder to constantly add a superimposing voltage to the control signal, the superimposing voltage being set to a constant voltage level;
a switching section which receives from the adder a signal obtained by adding the superimposing voltage to the control signal, to flow a first current that corresponds to a voltage obtained by adding the superimposing voltage to the first-voltage through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current, that corresponds to a voltage obtained by adding the superimposing voltage to the second-voltage and that has a current value smaller than a current value of the first current, through the resistance heater when the voltage level of the control signal is the second-voltage; and
a voltage measuring instrument to measure a voltage value across the resistance heater at a time when the second current flows through the resistance heater,wherein the signal generator controls the temperature of the resistance heater by controlling the control signal based on the voltage value measured by the voltage measuring instrument.
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Abstract
A temperature control apparatus includes a resistance heater whose a resistance value changes depending on a temperature of the resistance heater; a signal generator to output a control signal having two voltage levels including a first-voltage and a second-voltage; a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater. The signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument.
7 Citations
20 Claims
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1. A temperature control apparatus comprising:
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a resistance heater whose resistance value changes depending on a temperature of the resistance heater; a signal generator to output a control signal having two voltage levels including a first-voltage and a second-voltage which is different from the first-voltage; an adder to constantly add a superimposing voltage to the control signal, the superimposing voltage being set to a constant voltage level; a switching section which receives from the adder a signal obtained by adding the superimposing voltage to the control signal, to flow a first current that corresponds to a voltage obtained by adding the superimposing voltage to the first-voltage through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current, that corresponds to a voltage obtained by adding the superimposing voltage to the second-voltage and that has a current value smaller than a current value of the first current, through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at a time when the second current flows through the resistance heater, wherein the signal generator controls the temperature of the resistance heater by controlling the control signal based on the voltage value measured by the voltage measuring instrument. - View Dependent Claims (2, 3, 4, 5)
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6. A processing apparatus to which a raw material is supplied and which is temperature-controlled to cause a reaction or a phase change of the raw material, the apparatus comprising:
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a processing device to cause the reaction or the phase change of the raw material; and a temperature control apparatus to control a temperature of the processing device, the temperature control apparatus including; a resistance heater which is provided in the processing device to heat the processing device, wherein a resistance value of the resistance heater changes depending on a temperature of the resistance heater; a signal generator to output a control signal having two voltage levels including a first-voltage and a second-voltage which is different from the first-voltage; an adder to constantly add a superimposing voltage to the control signal, the superimposing voltage being set to a constant voltage level; a switching section which receives from the adder a signal obtained by adding the superimposing voltage to the control signal, to flow a first current that corresponds to a voltage obtained by adding the superimposing voltage to the first-voltage through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current, that corresponds to a voltage obtained by adding the superimposing voltage to the second-voltage and that has a current value smaller than a current value of the first current, through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at a time when the second current flows through the resistance heater, and wherein the signal generator controls the temperature of the resistance heater by controlling the control signal based on the voltage value measured by the voltage measuring instrument. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
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14. A temperature control method for controlling a temperature of a resistance heater whose resistance value changes depending on the temperature, the method comprising:
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outputting a control signal having two voltage levels including a first-voltage and a second-voltage which is different from the first-voltage; constantly adding a superimposing voltage to the control signal, the superimposing voltage being set to a constant voltage level; flowing a first current which corresponds to a voltage obtained by adding the superimposing voltage to the first-voltage through the resistance heater when the voltage level of the control signal is the first-voltage, and flowing a second current, which corresponds to a voltage obtained by adding the superimposing voltage to the second-voltage and which has a current value smaller than a current value of the first current, through the resistance heater when the voltage level of the control signal is the second-voltage; measuring a voltage value across the resistance heater at a time when the second current flows through the resistance heater; and controlling the control signal to control the temperature of the resistance heater based on the measured voltage value. - View Dependent Claims (15, 16, 17)
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18. A temperature control method for controlling a temperature of a resistance heater whose resistance value changes depending on the temperature, the method comprising:
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outputting a control signal having two voltage levels including a first-voltage and a second-voltage which is different from the first-voltage; constantly adding a superimposing voltage to the control signal, the superimposing voltage being set to a constant voltage level; flowing a first current which corresponds to a voltage obtained by adding the superimposing voltage to the first-voltage through the resistance heater when the voltage level of the control signal is the first-voltage, and flowing a second current, which corresponds to a voltage obtained by adding the superimposing voltage to the second-voltage and which has a current value smaller than a current value of the first current, through the resistance heater when the voltage level of the control signal is the second-voltage; measuring a voltage value across the resistance heater at a time when the second current flows through the resistance heater, and measuring the resistance value of the resistance heater based on the measured voltage value and the current value of the second current; and controlling the control signal to control the temperature of the resistance heater based on the measured resistance value. - View Dependent Claims (19, 20)
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Specification