Fast microscale actuators for probe microscopy

• US 8,220,318 B2
• Filed: 07/13/2007
• Issued: 07/17/2012
• Est. Priority Date: 06/17/2005
• Status: Active Grant

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Degertekin, Fahrettin Levent
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US11/777,518
• Publication Number:
  US 20110170108A1
• Time in Patent Office: 1,831 Days
• Field of Search: 731/05
• US Class Current: 73/105
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/2406 Electrostatic or capacitive probes, e.g. electret or cMUT-probes
• CPC Class Codes: G01N 29/2437 Piezoelectric probes
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

A system for measuring a property of a sample includes an actuation device disposed on a substrate and includes a flexible surface spaced apart from the substrate and configured so as to allow placement of the sample thereupon. The actuation device also includes a vertical actuator that is configured to cause the flexible surface to achieve a predetermined displacement from the substrate when a corresponding potential is applied thereto. A sensing probe is disposed so as to be configured to interact with the sample thereby sensing the property of the sample.

Claims

1. An apparatus for sensing a property of a sample, comprising:

a. means for actuating the sample using a flexible surface upon which the sample is placed;

b. means for sensing a degree of actuation of the sample;

c. means for controlling actuation of the sample; and

d. means for sensing the property of the sample.

2. The apparatus of claim 1, wherein:

a. the means for sensing the property of the sample includes an array of sensing probes that are each capable of sensing a property of a sample;

b. the means for actuating the sample includes an array of actuation devices, each including a flexible surface that is spaced apart from a substrate, disposed so that each of the actuation devices is configured to interact with exactly one of the sensing probes; and

c. the means for controlling actuation of the sample includes a control circuit for applying a potential to each of the actuation devices so as to control displacement of the flexible surface from the substrate.

3. The apparatus of claim 2, wherein each of the actuation devices is independently addressable by the control circuit, so that displacement of each flexible surface of each of the actuation devices is independently controllable.

4. The apparatus of claim 2, wherein the sample is disposed on the flexible surface of each of the actuation devices.

5. The apparatus of claim 2, further comprising a feedback mechanism that monitors a displacement of each of the flexible surfaces.

6. The apparatus of claim 5, wherein the feedback mechanism comprises:

a. a source that directs a beam of electromagnetic radiation toward the flexible surface;

b. a first reflective surface disposed on the flexible surface that reflects a portion of the beam so as to form a reflected beam so that the reflected beam has a property that is indicative of the displacement of the flexible surface; and

c. a sensor that senses the property of the reflected beam.

7. The apparatus of claim 6, further comprising a diffraction grating that interacts with the reflected beam so as to generate a diffraction pattern that corresponds to the displacement of the flexible surface.

8. The apparatus of claim 6, further comprising a partially reflective surface disposed adjacent to the substrate and spaced apart from the first reflective surface so as to form a Fabry-Perot cavity therebetween, wherein the property sensed by the sensor comprises reflected beam intensity.

9. The apparatus of claim 5, wherein the feedback mechanism comprises:

a. a first conductor disposed adjacent to the flexible surface;

b. a second conductor spaced apart from the first conductor and adjacent to the substrate; and

c. a capacitance sensor that senses a capacitance between the first conductor and the second conductor, the capacitance corresponding to the displacement of the flexible surface from the substrate.

10. The apparatus of claim 2, wherein the substrate comprises a transparent material.

11. The apparatus of claim 2, wherein each of the array of sensing probes comprises a probe tip affixed to a distal end of a cantilever beam.

12. The apparatus of claim 2, wherein the means for actuating the sample actuate along a z-axis and further comprising a lateral actuator that includes:

a. an x-axis actuation member that moves the substrate along an x-axis that is transverse to the z-axis; and

b. a y-axis actuation member that moves the substrate along a y-axis that is transverse to both the z-axis and the x-axis.