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Microfabricated elastomeric valve and pump systems

  • US 8,220,487 B2
  • Filed: 11/01/2007
  • Issued: 07/17/2012
  • Est. Priority Date: 06/28/1999
  • Status: Expired due to Term
First Claim
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1. A microfabricated elastomeric structure, comprising:

  • an elastomeric block having a Young'"'"'s modulus between about 20 Pa and 1 GPa formed with microfabricated recesses therein, a portion of the elastomeric block deflectable when the portion is actuated, the recesses comprise a first microfabricated channel and a first microfabricated recess, the first microfabricated recess comprises a second microfabricated channel; and

    the portion comprises an elastomeric membrane deflectable into the first microfabricated channel when the membrane is actuated, wherein pressurizing the second channel causes the membrane separating the second channel from the first channel to be deflected into the first channel but does not cause the membrane separating a third channel from the second channel to be deflected into the third channel.

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