Microfabricated elastomeric valve and pump systems
First Claim
1. A microfabricated elastomeric structure, comprising:
- an elastomeric block having a Young'"'"'s modulus between about 20 Pa and 1 GPa formed with microfabricated recesses therein, a portion of the elastomeric block deflectable when the portion is actuated, the recesses comprise a first microfabricated channel and a first microfabricated recess, the first microfabricated recess comprises a second microfabricated channel; and
the portion comprises an elastomeric membrane deflectable into the first microfabricated channel when the membrane is actuated, wherein pressurizing the second channel causes the membrane separating the second channel from the first channel to be deflected into the first channel but does not cause the membrane separating a third channel from the second channel to be deflected into the third channel.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Citations
18 Claims
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1. A microfabricated elastomeric structure, comprising:
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an elastomeric block having a Young'"'"'s modulus between about 20 Pa and 1 GPa formed with microfabricated recesses therein, a portion of the elastomeric block deflectable when the portion is actuated, the recesses comprise a first microfabricated channel and a first microfabricated recess, the first microfabricated recess comprises a second microfabricated channel; and the portion comprises an elastomeric membrane deflectable into the first microfabricated channel when the membrane is actuated, wherein pressurizing the second channel causes the membrane separating the second channel from the first channel to be deflected into the first channel but does not cause the membrane separating a third channel from the second channel to be deflected into the third channel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A microfabricated elastomeric structure comprising:
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an elastomeric block having a Young'"'"'s modulus between about 20 Pa and 1 GPa; a first channel and a second channel separated by a separating portion of the elastomeric structure; and a microfabricated recess in the elastomeric block adjacent to the separating portion such that the separating portion may be actuated to deflect into the microfabricated recess, wherein pressurizing the second channel causes the separating portion separating the second channel from the first channel to be deflected into the first channel but does not cause the separating portion separating a third channel from the second channel to be deflected into the third channel. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification