Organic EL panel including an element substrate dehydrated in a shorter time and method for manufacturing the same
First Claim
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1. A method for manufacturing an organic EL panel, the method comprising the steps of:
- forming a plurality of transistors on a substrate;
forming a first protective film of organic material on the transistors;
forming a plurality of first electrodes connected to the respective transistors through contact holes in the first protective film; and
forming a second protective film to cover the edges of the first electrodes, including the sub-steps of;
forming a first aperture between adjacent first electrodes for exposing a part of the first electrodes and a second aperture for exposing the surface of the first protective film;
removing water contained in the first protective film by a dehydrating step after forming the second protective film;
forming an organic layer over the first electrodes; and
forming a second electrode on the organic layer.
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Abstract
An organic EL panel is produced with high productivity by a method in which a first protective film (planarizing layer) can be dehydrated in a shorter time without increasing the number of steps up to the step of forming a second protective film (separation film). The second protective film has regions at which the first protective film is exposed between first electrodes.
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Citations
4 Claims
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1. A method for manufacturing an organic EL panel, the method comprising the steps of:
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forming a plurality of transistors on a substrate; forming a first protective film of organic material on the transistors; forming a plurality of first electrodes connected to the respective transistors through contact holes in the first protective film; and forming a second protective film to cover the edges of the first electrodes, including the sub-steps of; forming a first aperture between adjacent first electrodes for exposing a part of the first electrodes and a second aperture for exposing the surface of the first protective film; removing water contained in the first protective film by a dehydrating step after forming the second protective film; forming an organic layer over the first electrodes; and forming a second electrode on the organic layer. - View Dependent Claims (2, 3, 4)
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Specification
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Current AssigneeCanon Kabushiki Kaisha (Canon Inc.)
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Original AssigneeCanon Kabushiki Kaisha (Canon Inc.)
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InventorsYamazaki, Takuro, Iwakura, Yasushi, Oya, Katsunori
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Primary Examiner(s)Mai, Anh
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Assistant Examiner(s)Hanley, Britt D
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Application NumberUS11/851,490Publication NumberTime in Patent Office1,775 DaysField of SearchNoneUS Class Current445/24CPC Class CodesH10K 50/84 Passivation; Containers; En...H10K 59/122 Pixel-defining structures o...H10K 59/124 Insulating layers formed be...H10K 59/87 Passivation; Containers; En...
