Isolating a control signal source in a high frequency power supply
First Claim
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1. A high frequency power supply for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz, the power supply comprising:
- at least one switch bridge including two series connected switching elements, and a first of the switching elements connected to a reference potential varying in operation;
a driver circuit including;
a driver configured to control the first of the switching elements, wherein the driver includes a differential input with two signal inputs and is connected to the reference potential, and wherein at least one of the two signal inputs is coupled to the reference potential via ohmic coupling; and
a signal transformer comprising a primary and a secondary winding and having a parasitic capacitance, wherein a magnitude of a resistance associated with the ohmic coupling is less than a magnitude of the parasitic capacitance; and
a control voltage source, the control voltage source connected via the signal transformer to the driver.
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Abstract
A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is connected to a reference potential varying in operation, and is activated by a driver, and wherein the driver has a differential input with two signal inputs and is connected to the reference potential varying in operation.
77 Citations
15 Claims
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1. A high frequency power supply for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz, the power supply comprising:
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at least one switch bridge including two series connected switching elements, and a first of the switching elements connected to a reference potential varying in operation; a driver circuit including; a driver configured to control the first of the switching elements, wherein the driver includes a differential input with two signal inputs and is connected to the reference potential, and wherein at least one of the two signal inputs is coupled to the reference potential via ohmic coupling; and a signal transformer comprising a primary and a secondary winding and having a parasitic capacitance, wherein a magnitude of a resistance associated with the ohmic coupling is less than a magnitude of the parasitic capacitance; and a control voltage source, the control voltage source connected via the signal transformer to the driver. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for operating a high frequency power supply, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz, the method comprising:
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generating an output power by means of at least one switch bridge that has at least two series connected switching elements including varying a reference potential of one of the switching elements in operation; controlling the switching element with a driver that has a differential input with two signal inputs, by applying a differential signal to the differential input; and transmitting a control voltage from a signal transformer comprising a primary and secondary winding to the driver, the signal transformer having a parasitic capacitance; wherein at least one of the two signal inputs is coupled to the reference potential via ohmic coupling and wherein a magnitude of a resistance associated with the ohmic coupling is less than a magnitude of the parasitic capacitance. - View Dependent Claims (12, 13, 14, 15)
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Specification