Interferometric modulator array with integrated MEMS electrical switches
First Claim
Patent Images
1. A display device comprising:
- a MEMS display portion comprising rows and columns of MEMS elements; and
a plurality of MEMS switches formed as one or more additional rows or columns of additional MEMS elements adjacent to the MEMS elements, wherein the MEMS switches and the MEMS elements of the display portion comprise collapsible cavities, wherein the MEMS switches each comprise;
a first terminal connected to one of the rows or one of the columns;
a second terminal configured to be connected to another circuit; and
a conductive strip, configured to move between at least first and second positions, wherein the conductive strip is electrically connected to the first and second terminals when in the first position, and the conductive strip is electrically disconnected from the first and second terminals when in the second position.
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Abstract
An iterferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches may form row or column select functions for the display.
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Citations
16 Claims
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1. A display device comprising:
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a MEMS display portion comprising rows and columns of MEMS elements; and a plurality of MEMS switches formed as one or more additional rows or columns of additional MEMS elements adjacent to the MEMS elements, wherein the MEMS switches and the MEMS elements of the display portion comprise collapsible cavities, wherein the MEMS switches each comprise; a first terminal connected to one of the rows or one of the columns; a second terminal configured to be connected to another circuit; and a conductive strip, configured to move between at least first and second positions, wherein the conductive strip is electrically connected to the first and second terminals when in the first position, and the conductive strip is electrically disconnected from the first and second terminals when in the second position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing a display device, the method comprising:
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forming a MEMS display portion comprising rows and columns of MEMS elements; and forming a plurality of MEMS switches as one or more additional rows or columns of additional MEMS elements adjacent to the MEMS elements, wherein the MEMS switches and the MEMS elements of the display portion comprise collapsible cavities, wherein forming the MEMS switches comprises; forming a first terminal connected to one of the rows or one of the columns; forming a second terminal configured to be connected to another circuit; and forming a conductive strip, configured to move between at least first and second positions, wherein the conductive strip is electrically connected to the first and second terminals when in the first position, and the conductive strip is electrically disconnected from the first and second terminals when in the second position. - View Dependent Claims (13, 14, 15, 16)
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Specification