Multilayer ceramic substrate, electronic component, and method of manufacturing multilayer ceramic substrate
First Claim
1. A multilayer ceramic substrate in which a plurality of ceramic substrate layers are laminated, the multilayer ceramic substrate comprising:
- a surface layer terminal electrode which is provided at an outermost ceramic substrate layer on at least one side of a front side and a back side and which comprises a surface layer via electrode and a metal plating layer deposited over an end surface of the surface layer via electrode; and
a via conductor which connects the surface layer terminal electrode and circuit patterns over an internal ceramic substrate layer,wherein the surface layer via electrode has it-s-the end surface in a via hole provided in the outermost ceramic substrate layer and at a level recessed from a surface of the outermost ceramic substrate layer, and a surface of the metal plating layer deposited over the end surface of the surface layer via electrode is at substantially same plane level as the surface of the outermost ceramic substrate layer or at a level recessed from the surface of the outermost ceramic substrate layer,wherein the metal plating layer matches, without a gap, at a boundary contacting an inner wall of the via hole.
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Accused Products
Abstract
A multilayer ceramic substrate in which an active element and a passive element are surface-equipped over the outermost surface on one side is provided. The multilayer ceramic substrate comprises a plurality of laminated ceramic substrate layers, a surface layer terminal electrode provided in a via hole of an outermost ceramic substrate layer on at least one side and having a surface layer via electrode and a metal plating layer deposited over an end surface of the surface layer via electrode, and a via conductor which connects the surface layer terminal electrode and circuit patterns over the ceramic substrate layer at the inside, wherein a via hole size of a surface layer terminal electrode for connection of the active element is smaller than a via hole size of a surface layer terminal electrode for connection of the passive element.
9 Citations
12 Claims
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1. A multilayer ceramic substrate in which a plurality of ceramic substrate layers are laminated, the multilayer ceramic substrate comprising:
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a surface layer terminal electrode which is provided at an outermost ceramic substrate layer on at least one side of a front side and a back side and which comprises a surface layer via electrode and a metal plating layer deposited over an end surface of the surface layer via electrode; and a via conductor which connects the surface layer terminal electrode and circuit patterns over an internal ceramic substrate layer, wherein the surface layer via electrode has it-s-the end surface in a via hole provided in the outermost ceramic substrate layer and at a level recessed from a surface of the outermost ceramic substrate layer, and a surface of the metal plating layer deposited over the end surface of the surface layer via electrode is at substantially same plane level as the surface of the outermost ceramic substrate layer or at a level recessed from the surface of the outermost ceramic substrate layer, wherein the metal plating layer matches, without a gap, at a boundary contacting an inner wall of the via hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification