Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument
First Claim
1. An apparatus for monitoring sample milling in a charged-particle instrument;
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
an ion-beam column for producing an ion beam;
the ion beam column having an ion-beam column axis;
the apparatus comprising;
a variable-tilt specimen holder attached to the tilt stage;
the variable-tilt specimen holder further comprising;
a first pivoting plate rotatably supported in the variable-tilt specimen holder;
the first pivoting plate having a slot for holding a specimen from a sample, where the specimen has a preferred axis for thinning by the ion beam;
the first pivoting plate having a range of rotation sufficient to move the preferred axis of thinning of the specimen from;
a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column is greater than zero to;
a second position where the preferred axis for thinning of the specimen is substantially parallel to the ion-beam column axis;
a second pivoting plate;
the second pivoting plate rotatably supported adjacent to the first pivoting plate;
a light detector;
the light detector supported on the second pivoting plate;
a light source;
the light source directed so as to pass light through the specimen and to the light detector when the specimen is positioned by the first pivoting plate to a preferred axis of thinning and the second pivoting plate is positioned to intercept light passing through the specimen.
3 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder attached to the instrument tilt stage. The variable-tilt specimen holder includes a first pivoting plate having a slot for holding a specimen rotatably supported in the specimen holder. The first pivoting plate has a range of rotation sufficient to move the axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column of the instrument is greater than zero, to a second position where the axis for thinning of the specimen is substantially parallel to the axis of the ion-beam column. A light detector intercepts light passing through the specimen as it is thinned to determine an endpoint for milling of the specimen.
43 Citations
8 Claims
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1. An apparatus for monitoring sample milling in a charged-particle instrument;
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
an ion-beam column for producing an ion beam;
the ion beam column having an ion-beam column axis;
the apparatus comprising;a variable-tilt specimen holder attached to the tilt stage;
the variable-tilt specimen holder further comprising;a first pivoting plate rotatably supported in the variable-tilt specimen holder; the first pivoting plate having a slot for holding a specimen from a sample, where the specimen has a preferred axis for thinning by the ion beam; the first pivoting plate having a range of rotation sufficient to move the preferred axis of thinning of the specimen from; a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column is greater than zero to; a second position where the preferred axis for thinning of the specimen is substantially parallel to the ion-beam column axis; a second pivoting plate;
the second pivoting plate rotatably supported adjacent to the first pivoting plate;a light detector; the light detector supported on the second pivoting plate;
a light source;the light source directed so as to pass light through the specimen and to the light detector when the specimen is positioned by the first pivoting plate to a preferred axis of thinning and the second pivoting plate is positioned to intercept light passing through the specimen. - View Dependent Claims (2, 3, 5, 6)
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
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4. An apparatus for monitoring sample milling in a charged-particle instrument;
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
an ion-beam column for producing an ion beam;
the ion beam column having an ion-beam column axis;
the apparatus comprising;a variable-tilt specimen holder attached to the tilt stage;
the variable-tilt specimen holder further comprising;a first pivoting plate rotatably supported in the variable-tilt specimen holder; the first pivoting plate having a slot for holding a specimen from a sample, where the specimen has a preferred axis for thinning by the ion beam; the first pivoting plate having a range of rotation sufficient to move the preferred axis of thinning of the specimen from; a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column is greater than zero to; a second position where the preferred axis for thinning of the specimen is substantially parallel to the ion-beam column axis; a second pivoting plate;
the second pivoting plate rotatably supported adjacent to the first pivoting plate;a mirror supported on the second pivoting plate; a light detector;
the light detector positioned to intercept light reflected from the mirror;a light source; the light source directed so as to pass light through the specimen and to the light detector by way of the mirror when the specimen is positioned by the first pivoting plate to a preferred axis of thinning and the second pivoting plate is positioned to intercept light passing through the specimen.
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
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7. A method for monitoring sample milling in a charged-particle instrument;
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
an ion-beam column for producing an ion beam;
the ion beam column having an ion-beam column axis;
the method comprising;placing a specimen for milling in a holder in a first pivoting plate; rotating the first pivoting plate so that the specimen is positioned to a preferred axis for thinning with respect to the ion beam column axis; milling the specimen; positioning a light detector so as to intercept light passing through the specimen; passing a light beam through the specimen to the light detector; comparing the output signal of the light detector to an output signal from the light detector previously recorded; and
,stopping the milling of the specimen when the output signal from the light detector reaches a pre-determined amplitude. - View Dependent Claims (8)
- the charged-particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt; and
Specification