Coupling apparatus, exposure apparatus, and device fabricating method

• US 8,228,484 B2
• Filed: 02/05/2008
• Issued: 07/24/2012
• Est. Priority Date: 07/09/2003
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Ono, Kazuya, Shibazaki, Yuichi
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US12/068,323
• Publication Number:
  US 20080186465A1
• Time in Patent Office: 1,631 Days
• Field of Search: 355/30, 355/53, 355/55, 355/67, 250/548
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Abstract

An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

Claims

1. A lithographic projection apparatus comprising:

an illumination system arranged to condition a radiation beam;

a support structure configured to hold a patterning device, the patterning device being capable of imparting the radiation beam with a pattern;

a substrate table configured to hold a substrate;

a projection system arranged to project the patterned radiation beam onto a target portion of the substrate, the projection system comprising a first part and a second part arranged between the first part and the substrate table, the first and second parts are two separate physical parts that are substantially isolated from each other such that vibrations in the second part are substantially prevented from being transferred to the first part, wherein each part comprises an optical element of the projection system and the first and second parts are not attached to and movable with the substrate;

an actuator configured to vary a position between the first and second parts; and

a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid,

wherein the substrate table is movable with respect to the projection system while at least part of the space between the projection system and the substrate is filled with the liquid.

2. The lithographic apparatus according to claim 1, wherein the first and second parts of the projection system are separated at a location between two lens elements.

3. The lithographic apparatus according to claim 1, further comprising:

a sensor configured to establish a position between a first optical element in the first part of the projection system and a second optical element in the second part of the projection system; and

a controller configured to control the actuator on the basis of output from the sensor to maintain a predetermined position between the first and second optical elements.

4. The lithographic apparatus according to claim 3, wherein the position is a distance in a direction substantially parallel to a direction of an optical axis of the projection system.

5. The lithographic apparatus according to claim 1, further comprising:

a controller configured to control the actuator to maintain a predetermined relative positioning between the first and second parts.

6. The lithographic apparatus according to claim 1, wherein the second part is at least partly supported by a resilient member connected between the second part and a base frame.

7. The lithographic apparatus according to claim 6, wherein the base frame is decoupled from a frame to which the first part is attached.

22. The lithographic apparatus according to claim 1, wherein the second part is arranged between the first part and the substrate table in a vertical direction.

23. The lithographic apparatus according to claim 22, wherein the second part is disposed vertically below the first part.

8. A device manufacturing method, comprising:

providing a liquid to a space between a substrate on a substrate table of a lithographic apparatus and a projection system of the lithographic apparatus, the projection system including a first part and a second part arranged between the first part and the substrate table, the second part being substantially isolated from the first part such that vibrations in the second part are substantially prevented from being transferred to the first part and the first and second parts are not attached to and movable with the substrate;

adjusting a relative positioning of the first and second parts of the projection System; and

projecting a patterned beam of radiation, using the first and second parts of the projection system, through the liquid onto a target portion of a substrate,

wherein the substrate table is movable with respect to the projection system while at least part of the space between the projection system and the substrate is filled with the liquid.

9. The method according to claim 8, further comprising:

establishing a position between a first optical element in the first part of the projection system and a second optical element in the second part of the projection system; and

adjusting the position of the first optical element, the second optical element, or both such that the established position is maintained at a predetermined position.

10. The method according to claim 9, wherein the position is a distance in a direction substantially parallel to a direction of an optical axis of the projection system.

11. The method according to claim 8, wherein the adjusting of the relative positioning of the first and second parts of the projection system maintains a predetermined relative positioning between the first and second parts of the projection system.

12. The method according to claim 8, wherein the first and second parts of the projection system are separated at a location between two lens elements.

13. The method according to claim 8, further comprising at least partly supporting the second part using a resilient member connected between the second part and a base frame of the lithographic apparatus.

14. The method according to claim 13, wherein the base frame is decoupled from a frame to which the first part is attached.

24. The method according to claim 8, wherein the second part is arranged between the first part and the substrate table in a vertical direction.

25. The method according to claim 24, wherein the second part is disposed vertically below the first part.

15. A lithographic projection apparatus comprising:

an illumination system arranged to condition a radiation beam;

a support structure that holds a patterning device, the patterning device being capable of imparting the radiation beam with a pattern;

a substrate table that holds a substrate;

a projection system arranged to project the patterned radiation beam onto a target portion of the substrate, the projection system comprising a first part and a second part arranged between the first part and the substrate table, the first and second parts are two separate physical parts that are decoupled, wherein each of the first and second parts comprises an optical element of the projection system;

an actuator configured to vary a position between the first and second parts; and

a liquid supply system that at least partly fills a space between the projection system and the substrate with a liquid,

wherein the substrate table is movable with respect to the projection system while at least part of the space between the projection system and the substrate is filled with the liquid.

16. The lithographic apparatus according to claim 15, wherein the first and second parts of the projection system are separated at a location between two lens elements.

17. The lithographic apparatus according to claim 15, further comprising:

a sensor that establishes a position between a first optical element in the first part of the projection system and a second optical element in the second part of the projection system; and

a controller that controls the actuator on the basis of output from the sensor to maintain a predetermined position between the first and second optical elements.

18. The lithographic apparatus according to claim 17, wherein the position is a distance in a direction substantially parallel to a direction of an optical axis of the projection system.

19. The lithographic apparatus according to claim 15, further comprising:

a controller that controls the actuator to maintain a predetermined relative positioning between the first and second parts.

20. The lithographic apparatus according to claim 15, wherein the second part is at least partly supported by a resilient member connected between the second part and a base frame.

21. The lithographic apparatus according to claim 20, wherein the base frame is decoupled from a frame to which the first part is attached.

26. The lithographic apparatus according to claim 15, wherein the second part is arranged between the first part and the substrate table in a vertical direction.

27. The lithographic apparatus according to claim 26, wherein the second part is disposed vertically below the first part.