Spatial light modulator with metal layers
First Claim
1. An image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator having a plurality of modulating elements wherein each modulating element further comprising:
- at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and
a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and the fixed electric potential layer constituting multiple overlapping layers of flat plates each having irregular non-rectangular shapes for complimentarily to one another for covering an entire horizontal surface of the modulating element to totally block the illumination light emitted from the light source to enter into areas below a modulating surface of each of the modulating elements.
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Accused Products
Abstract
The present invention provides image projection system implemented with a spatial light modulator, for modulating an illumination light projected from a light source wherein said spatial light modulator comprising an image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator comprising: at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and fixed electric potential layer overlapping one another and disposed at a location along a light path of the illumination light emitted from the light source to block said illumination light.
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Citations
23 Claims
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1. An image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator having a plurality of modulating elements wherein each modulating element further comprising:
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at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and the fixed electric potential layer constituting multiple overlapping layers of flat plates each having irregular non-rectangular shapes for complimentarily to one another for covering an entire horizontal surface of the modulating element to totally block the illumination light emitted from the light source to enter into areas below a modulating surface of each of the modulating elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator having a plurality of modulating elements wherein each modulating element further comprising:
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at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers constituting overlapping layers of flat plates each having irregular non-rectangular shapes for complimentarily to one another for covering an entire horizontal surface of the modulating element and extending respectively along a first and a second longitudinal directions overlapping and crossing each other; and one of the two different electrically conductive layers functioning as a conductive plate of a capacitor and the two different electrically conductive layers further totally block the illumination light emitted from the light source to enter into areas below a modulating surface of each of the modulating elements. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator comprising:
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at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and one of the two different electrically conductive layers functioning as a conductive plate of a capacitor and the two different electrically conductive layers are overlapped with one another; and the capacitor has a metal-insulator-metal (MIM) structure further includes an insulation film disposed immediately next to one of the two electrically conductive layers wherein the insulation film of the capacitor further comprises a layered film of a first layer of a tantalum pentoxide (Ta2O5) and a second layer of a niobium pentoxide (Nb2O5).
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Specification