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MEMS microphone, production method and method for installing

  • US 8,229,139 B2
  • Filed: 11/06/2006
  • Issued: 07/24/2012
  • Est. Priority Date: 11/10/2005
  • Status: Active Grant
First Claim
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1. A microphone in a miniaturized form, comprising:

  • a flat carrier substrate having a first recess extending through the carrier substrate,a first electro-acoustic transducer on a first surface of the carrier substrate and at least partially overlapping the first recess, anda cap on a second surface opposite the first surface, the cap being configured to form a tight seal with the second surface and span the first recess, the cap comprising at least one metallic layer for electromagnetic shielding.

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