Pattern aligning method, verifying method, and verifying device
First Claim
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1. A pattern alignment method, comprising:
- a first step of calculating an angle, scale, center point x coordinate, and center point Y coordinate, for each of a comparison source pattern and a comparison target pattern;
a second step of calculating an angle deviation between the comparison source pattern and the comparison target pattern, from the angle and scale for the comparison source pattern and the comparison target pattern;
a third step of calculating scale ratios of the comparison source pattern and the comparison target pattern, from the center point X coordinates and center point Y coordinates of the comparison source pattern and the comparison target pattern;
a fourth step of performing angle and scale conversion of the comparison source pattern or the comparison target pattern, using the angle and ratios; and
a fifth of, by using template matching, performing alignment of the comparison source pattern or the comparison target pattern that has been subjected to the angle-scale conversion with the comparison source pattern or the comparison target pattern that has not been subjected to the angle-scale conversion.
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Abstract
A pattern alignment method performs alignment of the comparison source pattern or the comparison target pattern that has been subjected to the angle-scale conversion with the comparison source pattern. Angular deviations and scale factors between the comparison source pattern and the comparison target pattern are computed separately, after angle and scale conversion, the measured template matching is performed. Therefore, parallel-displacement alignment can be made faster and precise alignment is possible. Template matching processing can be minimized, and aligning can be performed precisely and rapidly.
31 Citations
22 Claims
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1. A pattern alignment method, comprising:
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a first step of calculating an angle, scale, center point x coordinate, and center point Y coordinate, for each of a comparison source pattern and a comparison target pattern; a second step of calculating an angle deviation between the comparison source pattern and the comparison target pattern, from the angle and scale for the comparison source pattern and the comparison target pattern; a third step of calculating scale ratios of the comparison source pattern and the comparison target pattern, from the center point X coordinates and center point Y coordinates of the comparison source pattern and the comparison target pattern; a fourth step of performing angle and scale conversion of the comparison source pattern or the comparison target pattern, using the angle and ratios; and a fifth of, by using template matching, performing alignment of the comparison source pattern or the comparison target pattern that has been subjected to the angle-scale conversion with the comparison source pattern or the comparison target pattern that has not been subjected to the angle-scale conversion. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A pattern verifying method, comprising:
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a first step of calculating an angle, scale, center point X coordinate, and center point Y coordinate, for each of a comparison source pattern and a comparison target pattern; a second step of calculating an angle deviation between the comparison source pattern and the comparison target pattern, from the angle and scale for the comparison source pattern and the comparison target pattern; a third step of calculating scale ratios of the comparison source pattern and the comparison target pattern, from the center point X coordinates and center point Y coordinates of the comparison source pattern and the comparison target pattern; a fourth step of performing angle and scale conversion of the comparison source pattern or the comparison target pattern, using the angle and ratio; a fifth step of, by using template matching, performing alignment of the comparison source pattern or the comparison target pattern that has been subjected to the angle-scale conversion with the comparison source pattern or the comparison target pattern that has not been subjected to the angle-scale conversion; and a sixth step of calculating similarity of the aligned comparison source pattern and the comparison target pattern, and performing verifying. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A pattern verifying device, comprising:
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an acquisition unit which acquires a comparison target pattern; and a verifying unit which matches a comparison source pattern with the comparison target pattern, wherein the verifying unit calculates an angle, scale, center point X coordinate, and center point Y coordinate for each of the comparison source pattern and the comparison target pattern, calculates an angle deviation between the comparison source pattern and the comparison target pattern from the angle and scale of the comparison source pattern and the comparison target pattern, and calculates the scale ratio of the comparison source pattern and the comparison target pattern from the center point X coordinate and center point Y coordinate of the comparison source pattern and the comparison target pattern, and wherein the verifying unit angle-scale converts the comparison source pattern or the comparison target pattern using the angle and ratio, aligns, by template matching, the comparison source pattern or the comparison target pattern that has been subjected to angle-scale conversion, and the comparison source pattern or the comparison target pattern that has not been subjected to angle-scale conversion, and calculates the similarity of the comparison source pattern and the comparison target pattern after the alignment to perform verifying. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification