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Pattern aligning method, verifying method, and verifying device

  • US 8,229,250 B2
  • Filed: 02/10/2009
  • Issued: 07/24/2012
  • Est. Priority Date: 03/31/2008
  • Status: Active Grant
First Claim
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1. A pattern alignment method, comprising:

  • a first step of calculating an angle, scale, center point x coordinate, and center point Y coordinate, for each of a comparison source pattern and a comparison target pattern;

    a second step of calculating an angle deviation between the comparison source pattern and the comparison target pattern, from the angle and scale for the comparison source pattern and the comparison target pattern;

    a third step of calculating scale ratios of the comparison source pattern and the comparison target pattern, from the center point X coordinates and center point Y coordinates of the comparison source pattern and the comparison target pattern;

    a fourth step of performing angle and scale conversion of the comparison source pattern or the comparison target pattern, using the angle and ratios; and

    a fifth of, by using template matching, performing alignment of the comparison source pattern or the comparison target pattern that has been subjected to the angle-scale conversion with the comparison source pattern or the comparison target pattern that has not been subjected to the angle-scale conversion.

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