Pressure sensor
First Claim
1. A pressure sensor comprising:
- a substrate including a first side and a second side, the substrate including an opening extending between the first side and the second side;
a pressure sensing die mounted directly on the first side of the substrate with an adhesive, wherein the pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the pressure sensing die is positioned over the opening;
a first housing member positioned on the first side of the substrate and defining a first cavity around the pressure sensing die, wherein the first housing member includes a first pressure opening defined by one or more first edges of the first housing member, wherein the one or more first edges are tapered and/or chamfered;
a first flourosilicone gel positioned in the first cavity to cover at least part of the pressure sensing die and at least part of the first side of the substrate;
a second housing member positioned on the second side of the substrate and defining a second cavity, wherein the second housing member includes a second pressure opening defined by one or more second edges of the second housing member; and
a second flourosilicone gel positioned in the second cavity to cover at least part of the second side of the substrate.
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Accused Products
Abstract
A pressure sensor is disclosed that can help isolate the sensor and/or sensor components from a media to be sensed and/or can help reduce sensor damage caused by harsh operating environments. In one illustrative embodiment, the pressure sensor may include a substrate having a pressure sensing die mounted on a first side of the substrate, a first housing member defining a first cavity around the pressure sensing die, and a second housing member defining a second cavity on the second side of the substrate. A passivating agent, such as a gel, can be positioned in both the first cavity and the second cavity to transmit pressure from the media to a pressure sensing element (e.g. diaphragm) while isolating the pressure sensing element and other components from the media. In some cases, the first housing member and/or the second housing member may include an opening for exposing the passivating agent to the media. The opening may be defined by one or more tapered and/or chamfered edges to help provide freeze damage protection.
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Citations
21 Claims
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1. A pressure sensor comprising:
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a substrate including a first side and a second side, the substrate including an opening extending between the first side and the second side; a pressure sensing die mounted directly on the first side of the substrate with an adhesive, wherein the pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the pressure sensing die is positioned over the opening; a first housing member positioned on the first side of the substrate and defining a first cavity around the pressure sensing die, wherein the first housing member includes a first pressure opening defined by one or more first edges of the first housing member, wherein the one or more first edges are tapered and/or chamfered; a first flourosilicone gel positioned in the first cavity to cover at least part of the pressure sensing die and at least part of the first side of the substrate; a second housing member positioned on the second side of the substrate and defining a second cavity, wherein the second housing member includes a second pressure opening defined by one or more second edges of the second housing member; and a second flourosilicone gel positioned in the second cavity to cover at least part of the second side of the substrate.
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2. A pressure sensor comprising:
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a substrate including a first side and a second side, the substrate including an opening extending between the first side and the second side; a pressure sensing die mounted directly on the first side of the substrate with an adhesive, wherein the pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the pressure sensing die is positioned over the opening; a first housing member positioned on the first side of the substrate and defining a first cavity around the pressure sensing die, wherein the first housing member includes a first pressure opening defined by one or more first edges of the first housing member; a first passivating agent positioned in the first cavity to cover at least part of the pressure sensing die and at least part of the first side of the substrate; a second housing member positioned on the second side of the substrate and defining a second cavity, wherein the second housing member includes a second pressure opening defined by one or more second edges of the second housing member; and a second passivating agent positioned in the second cavity to cover at least part of the second side of the substrate. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A pressure sensor comprising:
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a substrate including a first side and a second side; a pressure sensing element mounted on the first side of the substrate; a first housing member positioned on the first side of the substrate and defining a first cavity around the pressure sensing element, wherein the first housing member includes a first pressure opening defined by one or more tapered and/or chamfered first edges; and a first passivating agent disposed in the first cavity covering at least part of the pressure sensing element, wherein the first passivating agent is configured to transmit a pressure of a first media at the first pressure opening to the pressure sensing element while isolating the pressure sensing element from the first media. - View Dependent Claims (14, 15, 16)
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17. A method of manufacturing a pressure sensor, the method comprising:
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mounting a pressure sensing die on a first side of a substrate, wherein the pressure sensing die includes a pressure sensing diaphragm; mounting a first housing member on the first side of the substrate to form a first cavity around the pressure sensing die, wherein the first housing member includes a first pressure opening defined by one or more first edges of the first housing member; filling at least a portion of the first cavity with a first gel to cover at least part of the pressure sensing die; mounting a second housing member on a second side of the substrate to form a second cavity, wherein the second housing member includes a second pressure opening defined by one or more second edges of the second housing member; and filling at least a portion of the second cavity with a second gel. - View Dependent Claims (18, 19, 20, 21)
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Specification