Fabrication process for mastering imaging lens arrays
First Claim
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1. A method of mastering a waferscale imaging lens array comprising:
- fabricating a sub-array of lenses comprised of a plurality of individual, lens elements, wherein the number of individual, lens elements in the sub-array is a sub-set of the number of individual, lens elements contained in the waferscale lens array;
checking the sub-array for shape deviations and pitch accuracy and repeating the fabricating step until, a final sub-array is formed, said final sub-array being substantially free of shape and pitch deviations; and
duplicating said final sub-array on a substrate a number of times sufficient to form the master waferscale lens array.
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Abstract
A process and method for fabricating a master lens array for use in the manufacture of duplicate lens arrays is provided. The fabrication methods provided herein are capable of maximizing the quality of the master lens array in an efficient and cost effective manner, thereby reducing the propagation of errors in the lenses formed using the master lens array.
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15 Claims
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1. A method of mastering a waferscale imaging lens array comprising:
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fabricating a sub-array of lenses comprised of a plurality of individual, lens elements, wherein the number of individual, lens elements in the sub-array is a sub-set of the number of individual, lens elements contained in the waferscale lens array; checking the sub-array for shape deviations and pitch accuracy and repeating the fabricating step until, a final sub-array is formed, said final sub-array being substantially free of shape and pitch deviations; and duplicating said final sub-array on a substrate a number of times sufficient to form the master waferscale lens array. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of mastering a waferscale imaging lens array comprising:
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fabricating a plurality of master lens pins, each master lens pin being of a different lens profile; checking each of said master lens pins for shape deviations and repeating the fabricating step until a set of final master lens pins are formed, said final set of master lens pins being substantially free of shape deviations; duplicating each of said master lens pins on a substrate a number of times sufficient to form a sub-array of lenses comprised of a plurality of individual, lens elements, wherein the number of individual, lens elements in the sub-array is a sub-set of the number of individual, lens elements contained in the waferscale lens array; checking the sub-array for pitch accuracy and repeating the fabricating step until a final sub-array is formed, said final sub-array being substantially free of pitch deviation; and duplicating said final sub-array on a substrate a number of times sufficient to form the master waferscale lens array. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification