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Fabrication process for mastering imaging lens arrays

  • US 8,231,814 B2
  • Filed: 03/17/2011
  • Issued: 07/31/2012
  • Est. Priority Date: 03/17/2010
  • Status: Active Grant
First Claim
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1. A method of mastering a waferscale imaging lens array comprising:

  • fabricating a sub-array of lenses comprised of a plurality of individual, lens elements, wherein the number of individual, lens elements in the sub-array is a sub-set of the number of individual, lens elements contained in the waferscale lens array;

    checking the sub-array for shape deviations and pitch accuracy and repeating the fabricating step until, a final sub-array is formed, said final sub-array being substantially free of shape and pitch deviations; and

    duplicating said final sub-array on a substrate a number of times sufficient to form the master waferscale lens array.

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