Angular velocity sensor having drive member coupling beam spaced apart from drive members
First Claim
Patent Images
1. An angular velocity sensor comprising:
- a first unit and a second unit, each including a drive member configured to be driven in a first direction, a detection member configured to move in a second direction perpendicular to the first direction, and an elastic member configured to join the drive member to the detection member; and
a coupling beam configured to couple a front surface of the drive member of the first unit to a front surface of the drive member of the second unit, whereinthe first unit and the second unit are arranged side by side in the first direction,the drive members, the detection members, and the elastic members of the first unit and the second unit are formed on a first plane parallel to a plane defined by the first direction and the second direction, andthe coupling beam is located above the first plane.
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Abstract
An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction.
11 Citations
38 Claims
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1. An angular velocity sensor comprising:
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a first unit and a second unit, each including a drive member configured to be driven in a first direction, a detection member configured to move in a second direction perpendicular to the first direction, and an elastic member configured to join the drive member to the detection member; and a coupling beam configured to couple a front surface of the drive member of the first unit to a front surface of the drive member of the second unit, wherein the first unit and the second unit are arranged side by side in the first direction, the drive members, the detection members, and the elastic members of the first unit and the second unit are formed on a first plane parallel to a plane defined by the first direction and the second direction, and the coupling beam is located above the first plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 19, 20, 21, 35, 36, 37)
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10. An angular velocity sensor comprising:
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a first unit and a second unit, each including a drive member configured to be driven in a first direction, a detection member configured to move in a second direction perpendicular to the first direction, and an elastic member configured to join the drive member to the detection member; and a coupling beam configured to couple a front surface of the detection member of the first unit to a front surface of the detection member of the second unit, wherein the first unit and the second unit are arranged side by side in the first direction, the drive members, the detection members, and the elastic members of the first unit and the second unit are formed on a first plane parallel to a plane defined by the first direction and the second direction, and the coupling beam is located above the first plane. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 27)
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22. An angular velocity sensor, comprising:
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a first oscillator having a first drive member movable in a first direction and a first detection member movable in a second direction perpendicular to the first direction; a second oscillator having a second drive member movable in the first direction and a second detection member movable in the second direction; and a first coupling beam is coupled between the first oscillator and the second oscillator in such a manner that the first oscillator and the second oscillator vibrate relative to each other in the first direction, wherein the first oscillator and the second oscillator are arranged side by side in the first direction, the first drive member and the first detection member of the first oscillator and the second drive member and the second detection member of the second oscillator are formed on a first plane parallel to a plane defined by the first direction and the second direction, the first coupling beam includes a first post fixed to the first oscillator, a second post fixed to the second oscillator, a first beam portion joined at a first end to the first post, a second beam portion joined at a first end to the second post, and a first spring portion joined at a first end to a second end of the first beam portion and joined at a second end to a second end of the second beam portion, the first post extends away from a surface of the first oscillator in a thickness direction of the first oscillator, the second post extends away from a surface of the second oscillator in a thickness direction of the second oscillator, the first beam portion, the second beam portion, and the first spring portion are spaced from the first plane by a thickness of the first post or the second post, the first beam portion is coupled through the first post to the first oscillator, the second beam portion is coupled through the second post to the second oscillator, and the first spring portion has elasticity at least in the first direction. - View Dependent Claims (23, 24, 25, 26, 28, 29, 30, 31, 32, 33, 34)
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38. An angular velocity sensor comprising:
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two sensor units, each sensor unit comprising; a drive weight movable in a first direction; a detection weight movable in a second direction perpendicular to the first direction; and a middle weight located between the drive weight and the detection weight, the middle weight configured to move in the first direction when the drive weight moves in the first direction, the middle weight configured to cause the detection weight to move in the second direction when the middle weight moves in the second direction; and a coupling beam configured to couple the middle weights of the sensor units together, wherein the sensor units are arranged side by side in the first direction, the drive weights, the detection weights, and the middle weights of the sensor units are formed on a first plane parallel to a plane defined by the first direction and the second direction, and the coupling beam is located above the first plane.
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Specification