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Angular velocity sensor having drive member coupling beam spaced apart from drive members

  • US 8,234,920 B2
  • Filed: 09/01/2009
  • Issued: 08/07/2012
  • Est. Priority Date: 09/02/2008
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • a first unit and a second unit, each including a drive member configured to be driven in a first direction, a detection member configured to move in a second direction perpendicular to the first direction, and an elastic member configured to join the drive member to the detection member; and

    a coupling beam configured to couple a front surface of the drive member of the first unit to a front surface of the drive member of the second unit, whereinthe first unit and the second unit are arranged side by side in the first direction,the drive members, the detection members, and the elastic members of the first unit and the second unit are formed on a first plane parallel to a plane defined by the first direction and the second direction, andthe coupling beam is located above the first plane.

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