Substrate processing apparatus with motors integral to chamber walls

• US 8,237,391 B2
• Filed: 08/26/2011
• Issued: 08/07/2012
• Est. Priority Date: 07/17/2007
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Krupyshev, Alexander G., Hofmeister, Christopher
• Primary Examiner(s): Ip, Paul
• Application Number:
  US13/219,267
• Publication Number:
  US 20110316370A1
• Time in Patent Office: 347 Days
• Field of Search: 318/568.21, 318/560, 318/561, 318/562, 318/571, 318/572, 451/66
• US Class Current: 318/568.21
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence

Abstract

In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

Claims

1. A substrate transport apparatus comprising:

a frame defining a chamber;

at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation;

at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber; and

at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.