MEMS micromirror and micromirror array
First Claim
Patent Images
1. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
- an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis;
an array of vertical comb drives that are electrostatically actuated for pivotally driving the array of micromirrors about the pivot axis, each vertical comb drive comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and
an electrostatic sink mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
4 Assignments
0 Petitions
Accused Products
Abstract
A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
-
Citations
23 Claims
-
1. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
-
an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis; an array of vertical comb drives that are electrostatically actuated for pivotally driving the array of micromirrors about the pivot axis, each vertical comb drive comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and an electrostatic sink mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
-
20. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
-
an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis; an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis, each electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and an electrostatic sink comprising an electrode mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
-
-
21. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
-
an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis; an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis, each electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and an electrostatic sink mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation, the electrostatic sink shielding at least one micromirror from accumulated electrostatic charge on the support structure.
-
-
22. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
-
an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis; the resilient structure comprising a first portion having an I beam connected to a composite structure, and a second portion that is symmetrical to the first portion, the first and second portions defining the pivot axis; an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis, each electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and an electrostatic sink that shields at least one micromirror from spurious electrostatic actuation. - View Dependent Claims (23)
-
Specification