PMR write head with narrow gap for minimal internal flux loss

• US 8,238,059 B1
• Filed: 04/06/2011
• Issued: 08/07/2012
• Est. Priority Date: 04/06/2011
• Status: Active Grant

• Current Assignee: Headway Technologies Incorporated (TDK Corporation)
• Original Assignee: Headway Technologies Incorporated (TDK Corporation)
• Inventors: Guan, Lijie, Min, Tai, Song, Suping, Tang, Yuhui
• Primary Examiner(s): CAO, ALLEN T
• Application Number:
  US13/066,095
• Time in Patent Office: 489 Days
• Field of Search: 360/125.03, 360/125.3, 360/125.09, 360/125.04, 360/123.1, 360/125.17, 360/125.12, 360/125.16, 360/125.15, 360/125.06, 360/125.26, 360/125.19, 360/125.13, 360/125.31, 360/125.21, 360/125.24, 360/125.27, 360/125.02
• US Class Current: 360/125.03
• CPC Class Codes: G11B 5/1278 specially adapted for magnetisations perpendicular to the surface of the record carrier
• CPC Class Codes: G11B 5/23 Gap features G11B5/1871, G11B5/1875, G11B5/265, G11B5/29, G11B5/488 and subgroups, G11B5/4907 and subgroups, G11B5/4969 and subgroups take precedence
• CPC Class Codes: G11B 5/3116 Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks G11B5/3113, G11B5/245 take precedence
• CPC Class Codes: G11B 5/315 Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
• CPC Class Codes: G11B 5/3163 Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Abstract

A PMR writer is disclosed wherein one or more of a trailing shield, leading shield, and side shields are composites with a first section made of an anisotropic (-Ku) magnetic layer adjoining a gap layer and a second section comprised of an isotropic soft magnetic layer formed on a side of the first section that faces away from the main pole. There may be a non-magnetic Ru layer between each first and second section to prevent interlayer coupling. Each first section has a hard axis in a direction toward the main pole and is comprised of hcp-CoIr, dhcp-CoFe, a′-Fe—C, or NiAs-type Mn₅₀Sb₅₀ with a thickness from 50 to 500 nm. As a result, flux leakage from the main pole to a shield structure is reduced and area density is increased. A method for fabricating a composite shield structure is also provided.

Claims

1. A perpendicular magnetic recording (PMR) writer, comprising:

(a) a main pole comprised of a trailing side and a leading side with respect to a down-track direction, and two sides connecting said leading and trailing sides;

said leading side has a leading edge at an air bearing surface (ABS) and said trailing side has a trailing edge at the ABS;

(b) a gap layer adjacent to and surrounding the main pole at the ABS wherein said gap layer includes a write gap along the trailing side and trailing edge, a lead gap along the leading side and leading edge, and a side gap along each of the sides of the main pole;

(c) a first shield section formed adjacent to at least one of the write gap, side gaps, and lead gap, said first shield section is comprised of an anisotropic (-Ku) magnetic material with a hard axis in a direction toward the main pole and a magnetization that is induced in a direction orthogonal to the hard axis with a weak magnetic field; and

(d) an isotropic magnetic shield formed adjacent to each first shield section on a side thereof facing away from the main pole, and contacting portions of the gap layer that are not adjacent to a first shield section.

2. The PMR writer of claim 1 wherein the at least one first shield section has a thickness between about 50 and 500 nm.

3. The PMR writer of claim 2 wherein the at least one first shield section is made of hcp-CoIr wherein the Ir content is between about 10 and 40 atomic %, dhcp-CoFe, a′

-Fe—

C, or NiAs-type Mn₅₀Sb₅₀.

4. The PMR writer of claim 3 wherein the at least one first shield section has a c-axis in the hard axis direction and formed with an angle between 0 and about 60 degrees with respect to the ABS.

5. The PMR writer of claim 1 further comprised of a non-magnetic layer made of Ru formed between the at least one first shield section and an adjacent isotropic magnetic shield.

6. The PMR writer of claim 1 wherein a first shield section is formed between the write gap and a trailing shield section made of an isotropic magnetic layer.

7. The PMR writer of claim 6 wherein the first shield section has a width that is greater than a width of the write gap in a cross-track direction.

8. The PMR writer of claim 1 wherein a first shield section is formed between each side gap and a side shield made of an isotropic magnetic layer.

9. The PMR writer of claim 8 wherein each first shield section extends a distance in a down-track direction that is greater than a thickness of the main pole at the ABS.

10. The PMR writer of claim 1 wherein a first shield section is formed between the leading gap and a leading shield section made of an isotopic magnetic layer.

11. A PMR writer, comprising:

(a) a main pole comprised of a trailing side and a leading side with respect to a down-track direction, and two sides connecting said leading and trailing sides;

said leading side has a leading edge at an air bearing surface (ABS) and said trailing side has a trailing edge at the ABS;

(b) a gap layer formed adjacent to and surrounding the main pole at the ABS wherein said gap layer includes a write gap along the trailing side and trailing edge, a lead gap along the leading side and leading edge, and a side gap along each of the sides of the main pole;

(c) a continuous first shield structure formed adjacent to said gap layer, said first shield structure has a plurality of sections each comprised of an anisotropic (-Ku) magnetic material with a hard axis in a direction toward the main pole and a magnetization that is induced in a direction orthogonal to the hard axis with a weak magnetic field;

(d) a seed layer separating the gap layer and the first shield structure, said seed layer induces the hard axis direction in the first shield structure toward the main pole;

(e) a continuous second shield structure made of an isotropic magnetic material and formed adjacent to the continuous first shield structure, said continuous second shield has a trailing section formed adjacent to a first trailing shield section, a leading section formed adjacent to a first leading shield section, and two side sections wherein each side section is formed adjacent to a nearest first side shield section, and each second shield section is formed along a side of a first shield section that faces away from the main pole; and

(f) a non-magnetic layer formed between the continuous first shield structure and the continuous second shield structure.

12. The PMR writer of claim 11 wherein the first leading shield section and first trailing shield section have a thickness in a down-track direction between about 50 and 500 nm, and the first side shield sections have a width in a cross-track direction from about 50 to 500 nm.

13. The PMR writer of claim 11 wherein each of the first trailing shield section, first leading shield section, and first side shield sections has a hard axis in a direction toward the main pole, and a c-axis aligned in the hard axis direction with an angle from 0 to about 60 degrees with respect to the ABS.

14. The PMR writer of claim 11 wherein each first shield section is made of hcp-CoIr wherein the Ir content is between about 10 and 40 atomic %, dhcp-CoFe, a′

-Fe—

C, or NiAs-type Mn₅₀Sb₅₀.

15. The PMR writer of claim 11 wherein the seed layer and the non-magnetic layer are comprised of Ru.

16. A method of fabricating a PMR writer having a composite trailing shield at an air bearing surface (ABS), comprising:

(a) sequentially forming a leading shield layer and a side shield layer on a substrate, said side shield layer has an opening formed therein which is bounded by side shield sidewalls and a top surface of said leading shield layer;

(b) depositing a side gap along said side shield sidewalls and a leading gap on the top surface of the leading shield layer;

(c) plating a main pole layer on the side gap and leading gap to fill the opening in the side shield layer, and planarizing a top surface of the main pole to be coplanar with said shield layer;

(d) depositing a write gap on the side gap and on the main pole top surface;

(e) sequentially forming a seed layer and an anisotropic (-Ku) magnetic layer on the write gap, said anisotropic (-Ku) magnetic layer forms a first section of trailing shield;

(f) forming a non-magnetic layer on the anisotropic (-Ku) magnetic layer; and

(g) plating a second section of trailing shield comprised of an isotropic magnetic layer on the non-magnetic layer and on portions of the side shield layer.

17. The method of claim 16 wherein the first trailing shield section has a thickness from 50 to 500 nm and is made of hcp-CoIr wherein the Ir content is between about 10 and 40 atomic %, dhcp-CoFe, a′

-Fe—

C, or NiAs-type Mn₅₀Sb₅₀.

18. The method of claim 16 wherein the seed layer and the non-magnetic metal layer are comprised of Ru.

19. A method of fabricating a PMR writer having a composite side shield structure at an air bearing surface (ABS), comprising:

(a) sequentially forming a leading shield layer and a side shield layer made of an isotropic soft magnetic layer on a substrate, said side shield layer has an opening formed therein which is bounded by side shield sidewalls and a top surface of said leading shield layer;

(b) depositing a non-magnetic metal layer on the side shield sidewalls;

(c) conformally depositing an anisotropic (-Ku) magnetic layer on the non-magnetic metal layer on each sidewall, said anisotropic (-Ku) magnetic layer forms a first shield section, and the isotropic magnetic layer is a second side shield section that together with the first side shield section form a composite side shield structure;

(d) depositing a conformal side gap on the first side shield sections, and a leading gap on the top surface of the leading shield layer;

(e) plating a main pole layer on the side gap and leading gap to fill the opening in the side shield layer, and planarizing a top surface of the main pole to be coplanar with said composite side shield structure;

(f) depositing a write gap on the side gap and on the main pole top surface; and

(g) plating a trailing shield on the write gap and on portions of the composite side shield structure.

20. The method of claim 19 wherein each first side shield section has a width in a cross-track direction from about 50 to 500 nm and is made of hcp-CoIr wherein the Ir content is between about 10 and 40 atomic %, dhcp-CoFe, a′

-Fe—

C, or NiAs-type Mn₅₀Sb₅₀.

21. The method of claim 19 wherein each first side shield section has a thickness in a down-track direction that is greater than a thickness of the main pole at the ABS.

22. A method of fabricating a PMR writer having a composite leading shield structure at an air bearing surface (ABS), comprising:

(a) forming a leading shield layer made of an isotropic soft magnetic material on a substrate, said leading shield layer has an opening formed therein which is bounded by sidewalls and a bottom surface within said leading shield layer;

(b) conformally depositing a non-magnetic metal layer on said sidewalls and bottom surface;

(c) depositing an anisotropic (-Ku) magnetic layer on the non-magnetic metal layer to fill said opening, said anisotropic (-Ku) magnetic layer forms a first leading shield section, and the isotropic magnetic layer is a second leading shield section that together with the first leading shield section forms a composite leading shield structure;

(d) forming a side shield layer made of an isotropic magnetic material on the composite leading shield structure, said side shield layer has an opening formed therein bounded by sidewalls and a top surface of said first leading shield section;

(e) depositing a conformal side gap on the side shield sidewalls, and a leading gap on the top surface of the first leading shield section;

(f) plating a main pole layer on the side gap and leading gap to fill the opening in the side shield layer, and planarizing a top surface of the main pole to be coplanar with said side shield layer;

(g) depositing a write gap on the side gap and on the main pole top surface; and

(h) plating a trailing shield on the write gap and on portions of the side shield layer.

23. The method of claim 22 wherein the first leading shield section has a thickness from 50 to 500 nm and is made of hcp-CoIr wherein the Ir content is between about 10 and 40 atomic %, dhcp-CoFe, a′

-Fe—

C, or NiAs-type Mn₅₀Sb₅₀.

24. The method of claim 22 wherein the non-magnetic metal layer is Ru with a thickness between about 2 and 5 nm.