Bipolar electrostatic chuck
First Claim
1. A method to attract a substrate comprising steps of:
- providing a bipolar electrostatic chuck comprises;
a first electrode;
a second electrode; and
an insulating material comprising an upper insulating layer, an inter-electrode insulating layer, and a lower insulating layer, whereinthe upper insulating layer, the first electrode, the inter-electrode insulating layer, the second electrode, and the lower insulating layer are positioned in the order of distance from a substrate attracting plane,the first electrode is formed in a comb-like configuration, andwhen the insulating material is viewed from a side cross-sectional view, the first electrode has a plurality of gaps, and the second electrode has a plurality of areas that are not overlapped with the first electrode; and
applying voltage between the first electrode and second electrode, so as to generate electric lines of force which extend from the first electrode to the second electrode, though the gaps of the first electrode and reaching the substrate attracting plane, wherein the first and second electrodes are positioned in different horizontal planes, when said bipolar electrostatic chuck is viewed from a side cross sectional view, said electric lines of force generate a gradient force whereby the substrate is attracted to a surface of the insulating material as the substrate attracting plane, whereinthe second electrode is formed in a plane having a given planar area,a part of the second electrode is overlapped with the first electrode in a normal line direction of the substrate attracting plane,a electrode width (z) of the first electrode and an inter-electrode gap (z) of the first electrode are made equal to each other, (z) is in a range of 0.15 to 0.5 mm, andthe inter-electrode insulating layer has a thickness of 1 to 1000 μ
m.
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Accused Products
Abstract
A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
36 Citations
10 Claims
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1. A method to attract a substrate comprising steps of:
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providing a bipolar electrostatic chuck comprises; a first electrode; a second electrode; and an insulating material comprising an upper insulating layer, an inter-electrode insulating layer, and a lower insulating layer, wherein the upper insulating layer, the first electrode, the inter-electrode insulating layer, the second electrode, and the lower insulating layer are positioned in the order of distance from a substrate attracting plane, the first electrode is formed in a comb-like configuration, and when the insulating material is viewed from a side cross-sectional view, the first electrode has a plurality of gaps, and the second electrode has a plurality of areas that are not overlapped with the first electrode; and applying voltage between the first electrode and second electrode, so as to generate electric lines of force which extend from the first electrode to the second electrode, though the gaps of the first electrode and reaching the substrate attracting plane, wherein the first and second electrodes are positioned in different horizontal planes, when said bipolar electrostatic chuck is viewed from a side cross sectional view, said electric lines of force generate a gradient force whereby the substrate is attracted to a surface of the insulating material as the substrate attracting plane, wherein the second electrode is formed in a plane having a given planar area, a part of the second electrode is overlapped with the first electrode in a normal line direction of the substrate attracting plane, a electrode width (z) of the first electrode and an inter-electrode gap (z) of the first electrode are made equal to each other, (z) is in a range of 0.15 to 0.5 mm, and the inter-electrode insulating layer has a thickness of 1 to 1000 μ
m. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10)
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2. A method to attract a substrate comprising steps of:
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providing a bipolar electrostatic chuck comprises; a first electrode; a second electrode; and an insulating material comprising an upper insulating layer, an inter-electrode insulating layer, and a lower insulating layer, wherein the upper insulating layer, the first electrode, the inter-electrode insulating layer, the second electrode, and the lower insulating layer are positioned in the order of distance from a substrate attracting plane, the first electrode is formed in a mesh configuration having a plurality of openings each within a given area, the second electrode is formed in a plane having a given planar area, wherein a part of the second electrode is overlapped with the first electrode in a normal line direction of the substrate attracting plane, and when the insulating material is viewed from a side cross-sectional view, the first electrode has a plurality of gaps, and the second electrode has a plurality of areas that are not overlapped with the first electrode; and applying voltage between the first electrode and second electrode, so as to generate electric lines of force which extend from the first electrode to the second electrode, though the gaps of the first electrode and reaching the substrate attracting plane, wherein the first and second electrodes are positioned in different horizontal planes, when said bipolar electrostatic chuck is viewed from a side cross sectional view, said electric lines of force generate a gradient force whereby the substrate is attracted to a surface of the insulating material as the substrate attracting plane, wherein a size of each of the openings of the first electrode is in a range of 0.1 to 3.0 mm, and the inter-electrode insulating layer has a thickness of 1 to 1000 μ
m.
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Specification