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Moisture barrier coatings for organic light emitting diode devices

  • US 8,241,713 B2
  • Filed: 02/21/2007
  • Issued: 08/14/2012
  • Est. Priority Date: 02/21/2007
  • Status: Active Grant
First Claim
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1. A process for fabricating an amorphous diamond-like film layer for protection of a moisture or oxygen sensitive organic light emitting diode, comprising:

  • forming a plasma at a pressure of 5-20 mTorr from vaporized silicone oil to decompose the silicone oil and form free radical species;

    reacting the free radical species at the surface of the organic light emitting diode to deposit an amorphous diamond-like plasma polymerized film layer from the plasma onto the moisture or oxygen sensitive organic light emitting diode thereby forming a protected organic light emitting diode.

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