Semiconductor device and manufacturing method of the same
First Claim
1. A manufacturing method of a semiconductor device, comprising the steps of:
- selectively forming a first material including an amino group over a substrate by discharging a composition including the first material including an amino group;
immersing the first material including an amino group in a solution including a first plating catalyst material so as to form the first plating catalyst material over the first material including an amino group;
immersing the first plating catalyst material in a plating solution including a first metal material so as to form a gate electrode layer over a surface of the first material including an amino group;
forming a gate insulating layer over the gate electrode layer;
selectively forming a source or drain electrode layer over the gate insulating layer by a droplet-discharge method; and
forming a semiconductor layer over the source or drain electrode layer,wherein the semiconductor layer comprises zinc oxide.
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Abstract
The manufacturing method of the present invention includes steps of selectively forming a photocatalyst material or a material including an amino group by discharging a composition including the photocatalyst material or the material including an amino group; immersing the photocatalyst material or the material including an amino group in a solution including a plating catalyst material so as to adsorb or deposit the plating catalyst material onto the photocatalyst material or the material including an amino group; and immersing the plating catalyst material in a plating solution including a metal material so as to form a metal film on a surface of the photocatalyst material or the material including an amino group adsorbing or depositing the plating catalyst material, thereby manufacturing a semiconductor device. The pH of the solution including the plating catalyst material is adjusted in a range of 3 to 6.
124 Citations
16 Claims
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1. A manufacturing method of a semiconductor device, comprising the steps of:
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selectively forming a first material including an amino group over a substrate by discharging a composition including the first material including an amino group; immersing the first material including an amino group in a solution including a first plating catalyst material so as to form the first plating catalyst material over the first material including an amino group; immersing the first plating catalyst material in a plating solution including a first metal material so as to form a gate electrode layer over a surface of the first material including an amino group; forming a gate insulating layer over the gate electrode layer; selectively forming a source or drain electrode layer over the gate insulating layer by a droplet-discharge method; and forming a semiconductor layer over the source or drain electrode layer, wherein the semiconductor layer comprises zinc oxide. - View Dependent Claims (2, 3)
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4. A manufacturing method of a semiconductor device, comprising the steps of:
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selectively forming a first material including an amino group over a substrate by discharging a composition including the first material including an amino group; immersing the first material including an amino group in a solution including a first plating catalyst material so as to form the first plating catalyst material over the first material including an amino group; immersing the first plating catalyst material in a plating solution including a first metal material so as to form a gate electrode layer over a surface of the first material including an amino group; forming a gate insulating layer over the gate electrode layer; selectively forming a source or drain electrode layer over the gate insulating layer by a droplet-discharge method; and forming a semiconductor layer over the source or drain electrode layer, wherein the semiconductor layer comprises zinc oxide, indium and gallium. - View Dependent Claims (5, 6)
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7. A manufacturing method of a semiconductor device, comprising the steps of:
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selectively forming a first material including an amino group over a substrate by discharging a composition including the first material including an amino group; immersing the first material including an amino group in a solution including a first plating catalyst material so as to form the first plating catalyst material over the first material including an amino group; immersing the first plating catalyst material in a plating solution including a first metal material so as to form a gate electrode layer over a surface of the first material including an amino group; forming a gate insulating layer over the gate electrode layer; selectively forming a second material including an amino group over the gate insulating layer by discharging a composition including the second material including an amino group; immersing the second material including an amino group in a solution including a second plating catalyst material so as to form the second plating catalyst material over the second material including an amino group; and immersing the second plating catalyst material in a plating solution including a second metal material so as to form a source or drain electrode layer over a surface of the second material including an amino group; and forming a semiconductor layer over the source or drain electrode layer, wherein the semiconductor layer comprises zinc oxide. - View Dependent Claims (8, 9, 10, 11)
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12. A manufacturing method of a semiconductor device, comprising the steps of:
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selectively forming a first material including an amino group over a substrate by discharging a composition including the first material including an amino group; immersing the first material including an amino group in a solution including a first plating catalyst material so as to form the first plating catalyst material over the first material including an amino group; immersing the first plating catalyst material in a plating solution including a first metal material so as to form a gate electrode layer over a surface of the first material including an amino group; forming a gate insulating layer over the gate electrode layer; selectively forming a second material including an amino group over the gate insulating layer by discharging a composition including the second material including an amino group; immersing the second material including an amino group in a solution including a second plating catalyst material so as to form the second plating catalyst material over the second material including an amino group; and immersing the second plating catalyst material in a plating solution including a second metal material so as to form a source or drain electrode layer over a surface of the second material including an amino group; and forming a semiconductor layer over the source or drain electrode layer, wherein the semiconductor layer comprises zinc oxide, indium and gallium. - View Dependent Claims (13, 14, 15, 16)
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Specification