UV treatment of etch stop and hard mask films for selectivity and hermeticity enhancement

• US 8,242,028 B1
• Filed: 04/03/2007
• Issued: 08/14/2012
• Est. Priority Date: 04/03/2007
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (LAM Research Corporation)
• Original Assignee: Novellus Systems Incorporated (LAM Research Corporation)
• Inventors: van Schravendijk, Bart, Denisse, Christian
• Primary Examiner(s): Chang, Leonard
• Application Number:
  US11/696,102
• Time in Patent Office: 1,960 Days
• Field of Search: 438/763, 438795-799, 257/749, 257/E31.054, 257/E31.093
• US Class Current: 438/763
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/31111 by chemical means
• CPC Class Codes: H01L 21/31144 using masks
• CPC Class Codes: H01L 21/76807 for dual damascene structures
• CPC Class Codes: H01L 21/76825 by exposing the layer to particle radiation, e.g. ion implantation, irradiation with UV light or electrons etc. plasma treatment H01L21/76826
• CPC Class Codes: H01L 21/76828 thermal treatment
• CPC Class Codes: H01L 21/76829 characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
• CPC Class Codes: H01L 21/76834 formation of thin insulating films on the sidewalls or on top of conductors H01L21/76831 takes precedence

Abstract

A method for the ultraviolet (UV) treatment of etch stop and hard mask film increases etch selectivity and hermeticity by removing hydrogen, cross-linking, and increasing density. The method is particularly applicable in the context of damascene processing. A method provides for forming a semiconductor device by depositing an etch stop film or a hard mask film on a substrate and exposing the film to UV radiation and optionally thermal energy. The UV exposure may be direct or through another dielectric layer.

Claims

1. A method of forming a semiconductor device, comprising:

depositing an etch stop film on a top surface of a substrate;

exposing the top surface of the substrate to ultra-violet (UV) radiation such that the etch properties of the etch stop film are modified; and

,

depositing a dielectric layer on the etch stop film, wherein the UV exposure occurs after the dielectric film is deposited on the etch stop film such that the UV radiation is applied to modify the etch stop film indirectly through the dielectric layer and wherein UV radiation is effective to remove Si—

H bonds within the etch stop film.

2. The method of claim 1, further comprising treating the substrate with thermal energy.

3. The method of claim 2, wherein the thermal energy treatment maintains the substrate temperature at 100°

C. to 800°

C.

4. The method of claim 2, wherein the thermal energy treatment maintains the substrate temperature at 300°

C. to 400°

C.

5. The method of claim 2, wherein the thermal energy is applied using a heater embedded in a substrate support and/or radiant source.

6. The method of claim 1, wherein the UV exposure removes hydrogen from the etch stop film.

7. The method of claim 1, wherein the UV radiation has a power density of about 1 mW-20 W/cm² and a wavelength from about 150-400 nm, and the exposure is conducted at ambient temperature for less than 20 minutes.

8. The method of claim 1, wherein the etch stop film is deposited using a PECVD process and its thickness is 50-500 angstroms.

9. The method of claim 1, wherein the etch stop film comprises one or more of SiNH, SiCH, SiCNH, SiOCH, SiCOH, SiBNH, SiBCH, SiBCOH, SiBCNH, SiONH and SiONCH.

10. The method of claim 1 further comprising depositing a hard mask film on the dielectric layer and exposing the top surface of the substrate to UV radiation such that the etch properties of the hard mask film are modified.

11. A method of forming a semiconductor device, comprising:

depositing a first dielectric layer on a top surface of a substrate;

depositing a hard mask film on the first dielectric layer;

depositing a second dielectric layer on the hard mask; and

exposing the top surface of the substrate to ultra-violet (UV) radiation such that the etch properties of the hard mask film are modified, wherein the UV exposure occurs after the second dielectric film is deposited on the hard mask film such that the UV radiation is applied to modify the hard mask film indirectly through the second dielectric layer and wherein the UV radiation is effective to remove Si—

H bonds within the film.

12. The method of claim 11, further comprising treating the substrate with thermal energy.

13. The method of claim 12, wherein the UV exposing is performed after the thermal treating.

14. The method of claim 11, wherein the UV radiation has a power density of about 1 mW-20 W/cm² and a wavelength from about 150-400 nm, and the exposure is conducted at ambient temperature for less than 20 minutes.

15. The method of claim 11, wherein the hard mask film is deposited using a PECVD process and its thickness is 50-500 angstroms.

16. The method of claim 11, wherein the thermal energy treatment maintains the substrate temperature at about 100°

C. to 800°

C.

17. The method of claim 11, wherein the thermal energy treatment maintains the substrate temperature at about 300°

C. to 400°

C.

18. The method of claim 11, wherein the thermal energy is applied using a heater embedded in a substrate support and/or by a radiant source.

19. The method of claim 11, wherein the UV exposure removes hydrogen from the hard mask film.

20. The method of claim 11, wherein the hard mask film comprises one or more of SiNH, SiCH, SiCNH, SiOCH, SiCOH, SiBNH, SiBCH, SiBCOH, SiBCNH, SiONH, and SiONCH.