Mixed-gate metal-oxide-semiconductor varactors

• US 8,242,581 B1
• Filed: 11/26/2008
• Issued: 08/14/2012
• Est. Priority Date: 11/26/2008
• Status: Active Grant

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: Altera Corporation (Intel Corporation)
• Inventors: Ratnakumar, Albert, Wong, Wilson, Liu, Jun, Xiang, Qi, Tung, Jeffrey Xiaoqi
• Primary Examiner(s): Rodela, Eduardo A
• Application Number:
  US12/324,793
• Time in Patent Office: 1,357 Days
• Field of Search: 257/312, 257/327, 257/331, 257/350, 257/388, 257/407, 257/412, 257/595, 257/E21.364, 257/E27.049, 257/E29.344, 257/E29.345, 257/E29.364
• US Class Current: 257/595
• CPC Class Codes: H01L 29/4983 with a lateral structure, e.g. a Polysilicon gate with a lateral doping variation or with a lateral composition variation or characterised by the sidewalls being composed of conductive, resistive or dielectric material
• CPC Class Codes: H01L 29/93 Variable capacitance diodes, e.g. varactors
• CPC Class Codes: H01L 29/94 Metal-insulator-semiconductors, e.g. MOS

Abstract

Mixed gate varactors are provided. The mixed gate varactors may include a semiconductor region of a given doping type. A first terminal for the varactor may be formed from a gate structure on the semiconductor region. A second terminal for the varactor may be formed from a heavily doped region in the semiconductor region that has the same doping type as the given doping type. A third terminal for the varactor may be formed from a heavily doped region in the semiconductor region that has a different doping type than the given doping type. The gate structure may include multiple gate conductors on a gate insulator. The gate insulator may be a high-K dielectric. The gate conductors may be metals or other materials that have different work functions. A conductive layer such as a layer of polysilicon may electrically connect the first and second gate conductors.

Claims

1. A mixed gate metal-oxide-semiconductor varactor comprising:

a semiconductor region;

a gate insulator formed on the semiconductor region; and

at least first and second gate conductors that are formed on the gate insulator and are in contact with each other, wherein the first and second gate conductors form part of a gate structure, wherein the gate structure further comprises a layer of polysilicon formed on the first and second gate conductors that electrically couples the first and second gate conductors, and wherein the first and second gate conductors have different work functions, respectively.

2. The mixed gate varactor defined in claim 1 wherein the first and second gate conductors comprise metal.

3. The mixed gate varactor defined in claim 1 wherein the first gate conductor comprises a first metal and wherein the second gate conductor comprises a second metal that is different than the first metal.

4. The mixed gate varactor defined in claim 1 further comprising at least a third gate conductor on the gate insulator.

5. The mixed gate varactor defined in claim 1 further comprising heavily doped regions in the semiconductor region that form a bias terminal for controlling capacitance for the mixed gate varactor.

6. The mixed gate varactor defined in claim 5 wherein the semiconductor region has a given doping type, wherein the heavily doped regions in the semiconductor region that form the bias terminal have a different doping type than the given doping type, wherein the mixed gate varactor further comprises a body contact region that is heavily doped with the given doping type, wherein the gate conductor structure forms a first capacitor terminal for the mixed gate varactor, wherein the body contact region forms a second capacitor terminal for the mixed gate varactor, and wherein the capacitance that is controlled by the bias terminal is provided across the first and second terminals.

7. The mixed gate varactor defined in claim 1 wherein at least part of the second gate conductor overlaps the first gate conductor.

8. The mixed gate varactor defined in claim 1 wherein the gate insulator is a dielectric comprising hafnium.

9. The mixed gate varactor defined in claim 1 wherein the gate insulator comprises a dielectric having a dielectric constant greater than silicon oxide.

10. The mixed gate varactor defined in claim 9 wherein the first gate conductor comprises a first metal, wherein the second gate conductor comprises a second metal, and wherein the first and second metals have different work functions.

11. The mixed gate varactor defined in claim 1 further comprising an input connected to the semiconductor region operable to receive a signal that is produced by a control circuit based on configuration data loaded into a programmable element.

12. A varactor having a capacitance, comprising:

a semiconductor having a given doping type;

a first terminal that is coupled to the semiconductor by a doped region having the same doping type as the given doping type, wherein the first terminal is operable to receive a first voltage;

a second terminal that is coupled to the semiconductor by a doped region having a different doping type than the given doping type, wherein the second terminal is operable to receive a second voltage that is adjustable and that is different than the first voltage, and wherein the second voltage is operable to be controlled for adjusting the capacitance of the varactor;

a gate insulating layer on the semiconductor; and

a gate structure on the gate insulating layer that has a length and a width that is greater than the length and that forms a third terminal for the varactor, wherein the gate structure comprises a first gate conductor having a first work function and a second gate conductor having second work function that is different than the first work function, wherein the first and second work functions of the first and second gate conductors contribute to the capacitance of the varactor, and wherein the first and second gate conductors are arranged in alternation along the width of the gate structure on a surface of the gate insulating layer.

13. The varactor defined in claim 12 further comprising at least a third gate conductor on the gate insulating layer that is adjacent to the second gate conductor and that has a different work function from the second gate conductor.

14. Variable capacitor circuitry having a capacitance, comprising:

a semiconductor having a given doping type;

a first terminal that is connected to the semiconductor by a doped region having the same doping type as the given doping type, wherein the first terminal is operable to receive a first voltage;

a second terminal that is connected to the semiconductor by a doped region having a different doping type than the given doping type, wherein the second terminal is operable to receive a second voltage that is different than the first voltage;

a gate insulating layer on the semiconductor; and

a gate structure on the gate insulating layer that forms a third terminal for the variable capacitor circuitry, wherein the gate structure comprises a first gate metal on the gate insulating layer, and a second gate metal on the gate insulating layer, wherein the second gate metal has a different work function than the first gate metal, wherein the work function of the first gate metal and the work function of the second gate metal contribute to the capacitance of the variable capacitor circuitry, wherein the gate structure has a length and a width that is greater than the length, and wherein the first gate metal and the second gate metal are arranged in alternation along the width of the gate structure.

15. The variable capacitor circuitry defined in claim 14 wherein silicon dioxide has a dielectric constant and wherein the gate insulating layer comprises a dielectric having a dielectric constant greater than the silicon dioxide dielectric constant.

16. The variable capacitor circuitry defined in claim 15 wherein the gate structure comprises a polysilicon layer that is electrically coupled to at least the first gate metal.

17. The variable capacitor circuitry defined in claim 14, further comprising:

a ground power supply line operable to supply the first voltage; and

a control circuit, wherein the control circuit has an output coupled to the second terminal and wherein the first terminal is coupled to the ground power supply line.

18. The variable capacitor circuitry defined in claim 17, further comprising:

a plurality of programmable elements, wherein the plurality of programmable elements are operable to provide static control signals to the control circuit to adjust the second voltage.