Inspection system and method
First Claim
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1. A manufacturing method including illuminating a target, comprising:
- providing a light controller including a light modulator having a plurality of pixels;
projecting light from a first light source to the light modulator, wherein the light from the first light source is incident on the light modulator at a first angle;
providing first and second optical paths between the light modulator and the target, wherein the first and second optical paths project at different angles;
controlling the pixels of the light modulator to establish illumination characteristics for the first optical path and the second optical path.
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Abstract
A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle. The pixels are controlled to establish illumination characteristics for first and second optical paths between the light controller and the target.
103 Citations
22 Claims
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1. A manufacturing method including illuminating a target, comprising:
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providing a light controller including a light modulator having a plurality of pixels; projecting light from a first light source to the light modulator, wherein the light from the first light source is incident on the light modulator at a first angle; providing first and second optical paths between the light modulator and the target, wherein the first and second optical paths project at different angles; controlling the pixels of the light modulator to establish illumination characteristics for the first optical path and the second optical path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An inspection system, comprising:
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a light controller including a light modulator having a plurality of pixels; a first light source arranged to project light incident on the light modulator at a first angle; wherein the light controller is operable to control the pixels of the light modulator to establish illumination characteristics for first and second optical paths between the light controller and a target, wherein the first and second optical paths project at different angles. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification