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Inspection system and method

  • US 8,243,285 B2
  • Filed: 09/25/2009
  • Issued: 08/14/2012
  • Est. Priority Date: 04/03/2007
  • Status: Active Grant
First Claim
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1. A manufacturing method including illuminating a target, comprising:

  • providing a light controller including a light modulator having a plurality of pixels;

    projecting light from a first light source to the light modulator, wherein the light from the first light source is incident on the light modulator at a first angle;

    providing first and second optical paths between the light modulator and the target, wherein the first and second optical paths project at different angles;

    controlling the pixels of the light modulator to establish illumination characteristics for the first optical path and the second optical path.

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