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Component and production method for a component

  • US 8,245,571 B2
  • Filed: 11/03/2009
  • Issued: 08/21/2012
  • Est. Priority Date: 11/10/2008
  • Status: Active Grant
First Claim
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1. A component, comprising:

  • an acceleration sensor having at least one freely oscillatory mass; and

    a resonator having at least one resonating structure;

    wherein the at least one freely oscillatory mass of the acceleration sensor and the at least one resonating structure of the resonator are disposed at least one of on and in one chip.

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