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Method of forming an insulated gate field effect transistor device having a shield electrode structure

  • US 8,247,296 B2
  • Filed: 12/09/2009
  • Issued: 08/21/2012
  • Est. Priority Date: 12/09/2009
  • Status: Active Grant
First Claim
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1. A method of forming a semiconductor device comprising the steps of:

  • providing a semiconductor substrate having a major surface;

    forming a dielectric stack overlying the major surface, wherein the dielectric stack comprises a first layer and second layer overlying the first layer, and wherein one layer comprises an oxidation blocking layer;

    forming a first opening in the dielectric stack;

    forming a trench in the semiconductor substrate through the opening and extending from the major surface;

    forming an insulated shield electrode within the trench;

    removing the second layer;

    forming an insulated gate electrode within the trench, wherein the insulated gate electrode includes a conductive gate material;

    removing a portion of the conductive gate material to form a first recessed region above the insulated gate electrode;

    forming a dielectric plug within the first recessed region, wherein the dielectric plug comprises a material different than the first layer;

    forming a body region in the semiconductor substrate;

    removing the first layer;

    forming a source region in the body region self-aligned to the dielectric plug;

    forming dielectric spacers adjacent the dielectric plug;

    forming second recessed regions in the semiconductor substrate self-aligned to the spacers; and

    forming a first conductive layer coupled to the semiconductor substrate through the second recessed regions.

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