Inertial sensor
First Claim
1. An inertial sensor comprising:
- a basement layer having a main surface;
a first drive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first direction;
a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second direction than in the first direction;
a first driving unit which vibrates the first drive frame in the first direction;
a second drive frame connected to the basement layer via a third elastic body having higher rigidity in the second direction than in the first direction;
a second Coriolis frame connected to the second drive frame via a fourth elastic body having lower rigidity in the second direction than in the first direction;
a second driving unit which vibrates the second drive frame in the first direction; and
a driving-direction acceleration detecting unit connected to the first drive frame via a fifth elastic body and connected to the second drive frame via a sixth elastic body,wherein the first driving unit and the second driving unit vibrate the first drive frame and the second drive frame in opposite phases in the first direction.
1 Assignment
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Accused Products
Abstract
One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
10 Citations
22 Claims
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1. An inertial sensor comprising:
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a basement layer having a main surface; a first drive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first direction; a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second direction than in the first direction; a first driving unit which vibrates the first drive frame in the first direction; a second drive frame connected to the basement layer via a third elastic body having higher rigidity in the second direction than in the first direction; a second Coriolis frame connected to the second drive frame via a fourth elastic body having lower rigidity in the second direction than in the first direction; a second driving unit which vibrates the second drive frame in the first direction; and a driving-direction acceleration detecting unit connected to the first drive frame via a fifth elastic body and connected to the second drive frame via a sixth elastic body, wherein the first driving unit and the second driving unit vibrate the first drive frame and the second drive frame in opposite phases in the first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 22)
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16. An inertial sensor comprising:
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a basement layer having a main surface; a first drive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first, direction; a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second direction than in the first direction; a first driving unit configured to vibrate the first drive frame in the first direction; a first structure that is configured to be vibrated in a same direction with the first drive frame; a second drive frame connected to the basement layer via a third elastic body having higher rigidity in the second direction than in the first direction; a second Coriolis frame connected to the second drive frame via a fourth elastic body having lower rigidity in the second direction than in the first direction; a second driving unit configured vibrate the second drive frame in the first direction; a second structure that is configured to be vibrated in a same direction with the second drive frame; and a driving-direction acceleration detecting unit connected between the first structure and the second structure, wherein the first driving unit and the second driving unit vibrate the first drive frame and the second drive frame in opposite phases in the first direction. - View Dependent Claims (17, 18)
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19. An inertial sensor comprising:
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a basement layer having a main surface; a first rive frame connected to the basement layer via a first elastic body having higher rigidity in a second direction than in a first direction, the first direction being parallel to the main surface and the second direction crossing the first direction; a first Coriolis frame connected to the first drive frame via a second elastic body having lower rigidity in the second direction than in the first direction; a first driving unit configured to vibrate the first drive frame in the first direction; a second drive frame connected to the basement layer via a third elastic body having higher rigidity in the second direction than in the first direction; a second Coriolis frame connected to the second drive frame via a fourth elastic body having lower rigidity in the second direction than in the first direction; a second driving unit configured to vibrate the second drive frame in the first direction; and a driving-direction acceleration detecting unit that detects an acceleration in the first direction, wherein the first drive frame and the second drive frame are connected via an elastic body, wherein the first driving unit and the second driving unit are configured to vibrate the first drive frame and the second drive frame in opposite phases in the first direction, and wherein the driving-direction acceleration detecting unit is connected to a joint of the elastic body. - View Dependent Claims (20, 21)
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Specification