Inertial sensor
First Claim
1. An inertial sensor comprising:
- (a) an angular rate sensor which detects an angular rate; and
(b) an acceleration sensor which detects acceleration, whereinthe angular rate sensor includes;
(a1) a first peripheral portion formed on a first semiconductor substrate;
(a2) a first cavity portion formed in the interior of the first peripheral portion;
(a3) a first fixing portion formed in the interior of the first cavity portion;
(a4) a vibrating body formed in the interior of the first cavity portion;
(a5) a first elastic deforming portion which is elastically deformable and connects the first fixing portion and the vibrating body;
(a6) a Coriolis frame formed in the interior of the vibrating body; and
(a7) a second elastic deforming portion which is elastically deformable and connects the vibrating body and the Coriolis frame, whereinthe acceleration sensor includes;
(b1) a second peripheral portion formed on a second semiconductor substrate;
(b2) a second cavity portion formed in the interior of the second peripheral portion;
(b3) a second fixing portion formed in the interior of the second cavity portion;
(b4) a movable body formed in the interior of the second cavity portion;
(b5) a third elastic deforming portion which is elastically deformable and connects the second fixing portion and the movable body; and
(b6) an acceleration detection portion which detects acceleration applied to the acceleration sensor,wherein the first cavity portion and the second cavity portion are at a same pressure,wherein the acceleration sensor is provided with a first shift suppressing portion, which is separate from the acceleration detection portion and is constructed to provide a damping function for suppressing shifts of the movable body with respect to an acceleration,wherein the angular rate sensor further includes an angular rate detecting portion that detects a Coriolis force caused by an angular rate applied to the angular rate sensor, andwherein the angular rate sensor is provided with a second shift suppressing portion, which is separate from the angular rate detecting portion and is constructed to provide a damping function for suppressing shifts of the Coriolis frame with respect to the Coriolis force.
1 Assignment
0 Petitions
Accused Products
Abstract
An angular rate sensor and an acceleration sensor are sealed at the same sealing pressure. The sealing pressure at this time is put into a reduced pressure state below the atmospheric pressure in view of improving a detection sensitivity of the angular rate sensor. Even in the reduced pressure atmosphere, to improve the detection sensitivity of the acceleration sensor, a shift suppressing portion (damper) for suppressing shifts of a movable body of the acceleration sensor is provided. This shift suppressing portion includes a plurality of protruding portions integrally formed with the movable body and a plurality of protruding portions integrally formed with a peripheral portion, and the protruding portions are alternately disposed separately at equal intervals.
15 Citations
17 Claims
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1. An inertial sensor comprising:
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(a) an angular rate sensor which detects an angular rate; and (b) an acceleration sensor which detects acceleration, wherein the angular rate sensor includes; (a1) a first peripheral portion formed on a first semiconductor substrate; (a2) a first cavity portion formed in the interior of the first peripheral portion; (a3) a first fixing portion formed in the interior of the first cavity portion; (a4) a vibrating body formed in the interior of the first cavity portion; (a5) a first elastic deforming portion which is elastically deformable and connects the first fixing portion and the vibrating body; (a6) a Coriolis frame formed in the interior of the vibrating body; and (a7) a second elastic deforming portion which is elastically deformable and connects the vibrating body and the Coriolis frame, wherein the acceleration sensor includes; (b1) a second peripheral portion formed on a second semiconductor substrate; (b2) a second cavity portion formed in the interior of the second peripheral portion; (b3) a second fixing portion formed in the interior of the second cavity portion; (b4) a movable body formed in the interior of the second cavity portion; (b5) a third elastic deforming portion which is elastically deformable and connects the second fixing portion and the movable body; and (b6) an acceleration detection portion which detects acceleration applied to the acceleration sensor, wherein the first cavity portion and the second cavity portion are at a same pressure, wherein the acceleration sensor is provided with a first shift suppressing portion, which is separate from the acceleration detection portion and is constructed to provide a damping function for suppressing shifts of the movable body with respect to an acceleration, wherein the angular rate sensor further includes an angular rate detecting portion that detects a Coriolis force caused by an angular rate applied to the angular rate sensor, and wherein the angular rate sensor is provided with a second shift suppressing portion, which is separate from the angular rate detecting portion and is constructed to provide a damping function for suppressing shifts of the Coriolis frame with respect to the Coriolis force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification