Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics

• US 8,250,921 B2
• Filed: 07/06/2007
• Issued: 08/28/2012
• Est. Priority Date: 07/06/2007
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Nasiri, Steven S., Sachs, David, Taheri, Babak
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US11/774,488
• Publication Number:
  US 20090007661A1
• Time in Patent Office: 1,880 Days
• Field of Search: 734/93, 735/10, 735/11, 734/97
• US Class Current: 73/511
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0845 using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different
• CPC Class Codes: G01P 2015/0865 using integrated signal processing circuitry
• CPC Class Codes: G01P 2015/088 for providing wafer-level encapsulation

Abstract

A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.

Claims

1. An inertial measurement unit (IMU) operable to be mounted onto a surface of a board, the IMU comprising:

three linear accelerometers, each one of the three accelerometers operable to provide a first measurement output corresponding to a measurement of linear acceleration in one axis, wherein a sensitive axis of each accelerometer is orthogonal to the sensitive axes of the other accelerometers, wherein the three accelerometers being formed on a first silicon substrate;

three rotation sensors, each one of the three rotation sensors is a vibratory gyroscope with electrostatic actuation and electrostatic sensing operable to provide a second measurement output corresponding to a measurement of rotation about one axis, wherein a sensitive axis of each vibratory gyroscope is orthogonal to the sensitive axis of the other vibratory gyroscopes, wherein the three of vibratory gyroscopes-being formed on the first silicon substrate; and

an application specific integrated circuit (ASIC) to receive both the first measurement outputs from the three linear accelerometers and the second measurement outputs from the three vibratory gyroscopes, wherein the ASIC includes a computation unit and a memory coupled to the computation unit, wherein the computation unit receives and processes data from the three accelerometers and the three vibratory gyroscopes to track motion in space, the ASIC being implemented on a second silicon substrate,

wherein the first silicon substrate is vertically stacked and attached to the second silicon substrate and is substantially parallel to the second silicon substrate, the first silicon substrate being electrically connected to the second silicon substrate to form a single semiconductor chip.

2. The IMU of claim 1, wherein the IMU includes built-in logic for analyzing data from the three accelerometers and the three vibratory gyroscopes.

3. The IMU of claim 2, wherein the built-in logic is configured to determine an orientation of the IMU.

4. The IMU of claim 2, wherein the built-in logic is configured to detect rotational motion or linear motion, and determine an axis of the rotational motion or the linear motion.

5. The IMU of claim 2, wherein the built-in logic includes a system of programmable interrupts, the system of interrupts permitting a user to determine which types of motion should provide interrupts.

6. The IMU of claim 5, wherein the built-in logic is modifiable by the user to detect linear motion or rotational motion responsive to the linear motion or the rotational motion exceeding a pre-determined threshold for a pre-determined time period, wherein both the pre-determined threshold and the pre-determined time period is programmable by the user.

7. The IMU of claim 2, wherein the built-in logic is further configured to detect when motion of the IMU is below a pre-determined threshold, and reset biases of the three vibratory gyroscopes responsive to the motion of the IMU being below the pre-determined threshold.

8. The IMU of claim 1, further comprising a third silicon substrate that is vertically bonded to the first silicon substrate to seal the first silicon substrate within a hermetic enclosure in between the third silicon substrate and the second silicon substrate.

9. The IMU of claim 8, further comprising bond pads for bonding the IMU onto a printed circuit board.

10. The IMU of claim 1, wherein the ASIC comprises an analog to digital converter (ADC).

11. The IMU of claim 10, wherein the analog-to-digital converter is operable to convert both the first measurement output and the second measurement output from an analog signal to a corresponding digital signal.

12. The IMU of claim 11, wherein the application specific integrated circuit (ASIC) further comprises a microcontroller operable to receive the digital signal from the analog-to-digital converter and process the digital signal.

13. The IMU of claim 12, wherein the microcontroller is operable to process the digital signal including performing an optical image stabilization calculation based on the digital signal or the computation unit.

14. The IMU of claim 1, wherein the application specific integrated circuit (ASIC) further comprises a pulse width modulator (PWM) in communication with a microcontroller, the pulse width modulator operable to drive an actuator.

15. The IMU of claim 14, wherein the application specific integrated circuit (ASIC) further comprises a communication interface in communication with the microcontroller.

16. The IMU of claim 15, wherein the communication interface comprises a serial peripheral interface (SPI) or an integrated circuit (I2C) interface.

17. The IMU of claim 16, wherein a footprint of the module is substantially 6×

8 mm or less.

18. The IMU of claim 1, further comprising a pin that is useable to synchronize motion data to an external signal, the external signal being one of a mechanical shutter signal, a frame valid signal, a GPS clock signal, or external timing input signal.

19. The IMU of claim 1, wherein the application specific integrated circuit (ASIC) further comprises a multiplexer

operable to selectively provide at least one of the first measurement outputs from the three accelerometers or one or more measurement outputs from one or more corresponding measurement devices coupled to the analog-to-digital converter.

20. The IMU of claim 19, wherein the one or more measurement devices includes one or more of a rotation sensor, an accelerometer, a position sensor, a barometer, a geomagnetic sensor, or a temperature sensor.

21. The IMU of claim 1, wherein the first and second silicon substrates comprise silicon wafers.

22. The IMU of claim 1 wherein the first substrate is mechanically and hermetically bonded to the second substrate.