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Multi-axis force sensor and acceleration sensor

  • US 8,250,934 B2
  • Filed: 02/09/2010
  • Issued: 08/28/2012
  • Est. Priority Date: 02/10/2009
  • Status: Active Grant
First Claim
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1. A multi-axis force sensor comprising:

  • an action portion to which external force is applied;

    a support portion which supports the action portion;

    a connection portion which connects the support portion to the action portion;

    strain producing portions which are formed at the connection portion and which produce strain originating from the external force;

    a first group of strain resistance elements and a second group of strain resistance elements provided at the respective strain producing portions;

    first bridge circuit groups which detect respective resistances of the first group of strain resistance elements and second bridge circuit groups which detect respective resistances of the second group of strain resistance elements,wherein the strain producing portions are formed on two axes intersecting at right angle on the same plane,the first group of strain resistance elements are provided on one axis across the action portion so as to face with respect to each other, the second group of strain resistance elements are provided on another axis across the action portion so as to face with respect to each other,the first bridge circuit groups output a positive voltage respectively when the first group of strain resistance elements receive tensile force originating from the external force and output a negative voltage when the first group of strain resistance elements receive compressive force, and the second bridge circuit group output a negative voltage respectively when the second group of strain resistance elements receive tensile force and output a positive voltage when the second group of strain resistance elements receive compressive force.

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