Methods for forming roughened surfaces and applications thereof

• US 8,252,703 B2
• Filed: 04/11/2011
• Issued: 08/28/2012
• Est. Priority Date: 04/28/2006
• Status: Active Grant

• Current Assignee: ASM International NV
• Original Assignee: ASM International NV
• Inventors: Huotari, Hannu, Haukka, Suvi
• Primary Examiner(s): LE, DUNG ANH
• Application Number:
  US13/084,254
• Publication Number:
  US 20110256722A1
• Time in Patent Office: 505 Days
• Field of Search: 438782-785, 438/680, 438/695, 997/742, 997/773, 977/742, 977/773
• US Class Current: 438/785
• CPC Class Codes: H01L 21/32051 Deposition of metallic or metal-silicide layers
• CPC Class Codes: H01L 28/84 being a rough surface, e.g. using hemispherical grains
• CPC Class Codes: H10B 12/033 the capacitor extending over the transistor
• CPC Class Codes: Y10S 977/742 Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/773 Nanoparticle, i.e. structure having three dimensions of 100 nm or less

Abstract

Methods of forming a roughened metal surface on a substrate are provided, along with structures comprising such roughened surfaces. In preferred embodiments roughened surfaces are formed by selectively depositing metal or metal oxide on a substrate surface to form discrete, three-dimensional islands. Selective deposition may be obtained, for example, by modifying process conditions to cause metal agglomeration or by treating the substrate surface to provide a limited number of discontinuous reactive sites. The roughened metal surface may be used, for example, in the manufacture of integrated circuits.

Claims

1. A method for forming a roughened surface on a substrate, comprising:

depositing a metal oxide film on the substrate; and

reducing the metal oxide at a temperature at which agglomeration occurs.

2. The method of claim 1, wherein the temperature at which the metal oxide is reduced is between 350°

C. and 650°

C.

3. The method of claim 1, wherein reducing comprises exposing the metal oxide to a reducing agent selected from the group consisting of alcohols (—

OH), aldehydes (—

CHO) and carboxylic acids (—

COOH).

4. The method of claim 1, wherein the metal oxide is deposited by an atomic layer deposition (ALD) process.

5. The method of claim 1, wherein the roughened surfaced selectively forms on one surface of the substrate relative to a second surface of the substrate.

6. The method of claim 1, wherein the temperature at which the metal oxide is deposited is from about 250°

C. to about 400°

C.

7. The method of claim 1, wherein the substrate temperature when reducing the metal oxide is from about 250°

C. to about 400°

C.

8. The method of claim 1, wherein the roughened surface comprises islands.

9. The method of claim 8, wherein the islands comprise particles or grains.

10. The method of claim 8, further comprising deposition of nanotubes on the roughened surface.

11. The method of claim 1, wherein the deposited metal oxide film is conformal.

12. The method of claim 4, wherein the ALD process involves surface saturation of the available reactant sites.

13. The method of claim 1, wherein the deposited metal oxide film is smooth prior to reduction.

14. The method of claim 1, wherein reducing comprises exposing the metal oxide to an excited species of hydrogen.

15. The method of claim 1, wherein the reduced metal oxide layer that forms the roughened surface is not continuous.

16. The method of claim 1, wherein the metal oxide is reduced to elemental metal.

17. The method of claim 1, wherein the reduced metal oxide comprises one or more of Cr, Cu, Ni, Fe, Co, Zn, Ru, Rh, Pd, Ag, Re, Os, Ir, Pt, Mo and W.

18. The method of claim 1, wherein the substrate comprises a surface material that promotes agglomeration prior to depositing the metal oxide.

19. The method of claim 1, wherein the substrate is treated with plasma to form a surface termination that promotes agglomeration prior to depositing the metal oxide.

20. The method of claim 1, wherein the substrate is annealed to form a hydroxyl surface termination that promotes agglomeration prior to depositing the metal oxide.

21. The method of claim 1, further comprising depositing a dielectric layer over the roughened surface.

22. A method for forming a roughened surface on a substrate, comprising:

depositing a metal oxide on the substrate by providing vapor phase reactants to the substrate; and

reducing the metal oxide at a temperature at which agglomeration occurs.