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Probe apparatus and test apparatus

  • US 8,253,428 B2
  • Filed: 09/17/2010
  • Issued: 08/28/2012
  • Est. Priority Date: 09/25/2009
  • Status: Active Grant
First Claim
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1. A probe apparatus exchanging signals with a target device, comprising:

  • a contact section electrically connected to the target device by contacting a terminal of the target device;

    a non-contact section that exchanges signals, via a signal path not including the contact section, with the target device in a state not contacting the terminal of the target device; and

    a retaining section, including a thin film section, that retains the contact section and the non-contact section, in such a manner that a relative position between the contact section and the non-contact section in a connection direction connecting the non-contact section and a region corresponding to the target device is displaceable, wherein the contact section and at least a part of the non-contact section are provided on a surface of the thin film section closer to the target device.

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