Probe apparatus and test apparatus
First Claim
Patent Images
1. A probe apparatus exchanging signals with a target device, comprising:
- a contact section electrically connected to the target device by contacting a terminal of the target device;
a non-contact section that exchanges signals, via a signal path not including the contact section, with the target device in a state not contacting the terminal of the target device; and
a retaining section, including a thin film section, that retains the contact section and the non-contact section, in such a manner that a relative position between the contact section and the non-contact section in a connection direction connecting the non-contact section and a region corresponding to the target device is displaceable, wherein the contact section and at least a part of the non-contact section are provided on a surface of the thin film section closer to the target device.
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Abstract
A probe apparatus exchanging signals with a target device, includes: a contact section electrically connected to the target device by contacting a terminal of the target device; a non-contact section that exchanges signals with the target device in a state not contacting the terminal of the target device; and a retaining section that retains the contact section and the non-contact section, in such a manner that a relative position between the contact section and the non-contact section in a connection direction connecting the non-contact section and a region corresponding to the target device is displaceable.
17 Citations
20 Claims
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1. A probe apparatus exchanging signals with a target device, comprising:
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a contact section electrically connected to the target device by contacting a terminal of the target device; a non-contact section that exchanges signals, via a signal path not including the contact section, with the target device in a state not contacting the terminal of the target device; and a retaining section, including a thin film section, that retains the contact section and the non-contact section, in such a manner that a relative position between the contact section and the non-contact section in a connection direction connecting the non-contact section and a region corresponding to the target device is displaceable, wherein the contact section and at least a part of the non-contact section are provided on a surface of the thin film section closer to the target device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A probe apparatus exchanging signals with a target device, comprising:
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a contact section electrically connected to the target device by contacting a terminal of the target device; a non-contact section that exchanges signals, via a signal path not including the contact section, with the target device in a state not contacting the terminal of the target device by means of magnetic field coupling or electric field coupling; and a retaining section that retains the contact section and the non-contact section, in such a manner that a relative position between the contact section and the non-contact section in a connection direction connecting the non-contact section and a region corresponding to the target device is displaceable. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification