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Exposure method, exposure apparatus and device manufacturing method

  • US 8,253,924 B2
  • Filed: 05/23/2006
  • Issued: 08/28/2012
  • Est. Priority Date: 05/24/2005
  • Status: Active Grant
First Claim
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1. An exposure method in which an energy beam is irradiated on an object via an optical system including a liquid and the object is exposed, the method comprising:

  • a process in which a variation of optical properties of the optical system due to an energy absorption of the liquid and a variation of a transmittance of the liquid to the energy beam is predicted, based on energy information of the energy beam which is incident on the liquid and information on the transmittance of the liquid to the energy beam, the energy information of the energy beam being detected via a sensor that detects the energy beam before the energy beam is incident on the liquid; and

    a process in which an exposure operation of the object is performed, based on a result of the prediction of the variation of the optical properties of the optical system due to the energy absorption of the liquid and the variation of the transmittance of the liquid to the energy beam.

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