Exposure method, exposure apparatus and device manufacturing method
First Claim
1. An exposure method in which an energy beam is irradiated on an object via an optical system including a liquid and the object is exposed, the method comprising:
- a process in which a variation of optical properties of the optical system due to an energy absorption of the liquid and a variation of a transmittance of the liquid to the energy beam is predicted, based on energy information of the energy beam which is incident on the liquid and information on the transmittance of the liquid to the energy beam, the energy information of the energy beam being detected via a sensor that detects the energy beam before the energy beam is incident on the liquid; and
a process in which an exposure operation of the object is performed, based on a result of the prediction of the variation of the optical properties of the optical system due to the energy absorption of the liquid and the variation of the transmittance of the liquid to the energy beam.
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Accused Products
Abstract
An exposure apparatus is provided with an optical system including a liquid, a sensor system for acquiring energy information of an energy beam which is incident on the liquid, and a controller which predicts variation of optical properties of the optical system including the liquid due to energy absorption of the liquid based on the energy information acquired using the sensor system and controls exposure operation with respect to an object based on the prediction results. According to the exposure apparatus, exposure operation without being influenced by the variation of the optical properties of the optical system including the liquid due to the energy absorption of the liquid becomes possible.
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Citations
43 Claims
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1. An exposure method in which an energy beam is irradiated on an object via an optical system including a liquid and the object is exposed, the method comprising:
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a process in which a variation of optical properties of the optical system due to an energy absorption of the liquid and a variation of a transmittance of the liquid to the energy beam is predicted, based on energy information of the energy beam which is incident on the liquid and information on the transmittance of the liquid to the energy beam, the energy information of the energy beam being detected via a sensor that detects the energy beam before the energy beam is incident on the liquid; and a process in which an exposure operation of the object is performed, based on a result of the prediction of the variation of the optical properties of the optical system due to the energy absorption of the liquid and the variation of the transmittance of the liquid to the energy beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An exposure apparatus that irradiates an energy beam on an object via a liquid and exposes the object, the apparatus comprising:
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an optical system that includes the liquid; a sensor system that acquires energy information of the energy beam incident on the liquid, the sensor system detecting the energy beam before the energy beam is incident on the liquid; and a control unit that performs a prediction of a variation of optical properties of the optical system including the liquid due to an energy absorption of the liquid and a variation of a transmittance of the liquid to the energy beam, based on the energy information acquired using the sensor system and information on the transmittance of the liquid to the enemy beam, and controls an exposure operation to the object, based on a result of the prediction of the variation of the optical properties of the optical system due to the energy absorption of the liquid and the variation of the transmittance of the liquid to the energy beam. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A device manufacturing method including a lithography process in which an object is exposed by irradiating an energy beam on the object via an optical system including a liquid to form a device pattern on the object, the method comprising:
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a process in which a variation of optical properties of the optical system due to an energy absorption of the liquid and a variation of a transmittance of the liquid to the energy beam is predicted, based on energy information of the energy beam which is incident on the liquid and information on the transmittance of the liquid to the energy beam, the energy information of the energy beam being detected via a sensor that detects the energy beam before the energy beam is incident on the liquid; and a process in which an exposure operation of the object is performed, based on a result of the prediction of the variation of the optical properties of the optical system due to the energy absorption of the liquid and the variation of the transmittance of the liquid to the energy beam. - View Dependent Claims (39, 40)
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41. A device manufacturing method including a lithography process in which an object is exposed by irradiating an energy beam on the object via an optical system including a liquid to form a device pattern on the object, the method comprising:
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a process in which energy information of the energy beam which is incident on the liquid is acquired, using a sensor system; a process in which a variation of optical properties of the optical system including the liquid due to an energy absorption of the liquid and a variation of a transmittance of the liquid to the energy beam is predicted based on the energy information acquired using the sensor system and information on the transmittance of the liquid to the energy beam, the sensor system detecting the energy beam before the energy beam is incident on the liquid; and a process in which an exposure operation of the object is performed, based on a result of the prediction of the variation of the optical properties of the optical system due to the energy absorption of the liquid and the variation of the transmittance of the liquid to the energy beam. - View Dependent Claims (42, 43)
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Specification