Interferometer actuator

• US 8,259,300 B2
• Filed: 04/21/2008
• Issued: 09/04/2012
• Est. Priority Date: 04/18/2007
• Status: Active Grant

• Current Assignee: ChemoMetec A/S
• Original Assignee: ChemoMetec A/S
• Inventors: Arnvidarson, Börkur
• Primary Examiner(s): Lyons, Michael A
• Application Number:
  US12/596,206
• Publication Number:
  US 20100149542A1
• Time in Patent Office: 1,597 Days
• Field of Search: 356/450, 356/521, 359/290, 359/291, 359/577, 359/578
• US Class Current: 356/450
• CPC Class Codes: G01B 9/02068 Auto-alignment of optical elements
• CPC Class Codes: G01B 9/02076 Caused by motion
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0202 Mechanical elements; Supports for optical elements
• CPC Class Codes: G01J 3/0256 Compact construction
• CPC Class Codes: G01J 3/06 Scanning arrangements arrangements for order-selection
• CPC Class Codes: G01J 3/453 by correlation of the amplitudes
• CPC Class Codes: H10N 30/2043 connected at their free ends, e.g. parallelogram type
• CPC Class Codes: H10N 30/2047 Membrane type

Abstract

The invention relates the movement of at least one movable means of an interferometer relative to the body of the interferometer. The system according to the invention, comprises at least two interferometer actuators, that can be operated individually, so that the at least two actuators are capable of moving the at least one movable means of the interferometer. When activating at least one of the at least two interferometer actuators the at least one movable means of the interferometer is moved with a minimum need for correcting for e.g. tilt. In a preferred configuration the system and the method according to the invention comprises three interferometer actuators that can be operated individually.

Claims

1. A method for the movement of at least one movable means of an interferometer relative to the body of the interferometer, comprising:

arranging at least three interferometer piezoelectric actuators, wherein said at least three interferometer piezoelectric actuators are arranged to be operated individually, so that the at least three piezoelectric actuators are capable of moving the at least one movable means of the interferometer;

activating at least one of the at least three interferometer piezoelectric actuators to operate in parallel, thereby moving the at least one movable means of the interferometer with a stroke length of at least 10 μ

m; and

activating at least one other of the at least three interferometer piezoelectric actuators to control the tilt of the at least one movable means.

2. The method according to claim 1, wherein the at least three interferometer actuators which are arranged to be operated individually comprises:

at least one bendable piezoelectric actuator; and

/or

at least one linear piezoelectric actuator.

3. The method according to claim 2, wherein:

at least three benders are arranged in series;

or

at least three segmented benders are arranged in series.

4. The method according to claim 2, wherein:

at least three benders are arranged in parallel, wherein the result of the arrangement is a substantial increase in mechanical stability of the movable means of the interferometer; and

at least one of the at least three benders arranged in parallel comprises at least one segmented bender.

5. The method according to claim 1, wherein the at least three piezoelectric actuators are activated by applying an electrical field causing them to bend, said bending causing said at least one movable means to move relative to said interferometer body.

6. The method according to claim 1, wherein:

the movement of the at least one movable means of an interferometer is provided by at least three piezoelectric benders in a bender arrangement, where the at least three piezoelectric benders in the bender arrangement are operated substantially in same manner; and

the length of the movement of the at least one movable means of the interferometer relative to the body of the interferometer is substantially equal to the stroke length of the at least one piezoelectric bender in the bender arrangement.

7. The method according to claim 1, wherein:

the at least three piezoelectric actuators are piezoelectric benders which are substantially identical in design and construction;

any piezoelectric bender is arranged at an angle to any other piezoelectric bender; and

the at least three piezoelectric bender elements in said bender arrangement are arranged on the same bender support to form a segmented bender.

8. The method according to claim 1, where the at least three piezoelectric actuators are piezoelectric bender elements and are arranged in such a manner that the direction from fixed point to moving point of the bender:

is parallel or in radial alignment for all bender elements;

or

is substantially off radial alignment for all bender elements.

9. The method according to claim 1, where combined stroke length of the at least three piezoelectric actuators is longer than 500 μ

m.

10. The method according to claim 1, wherein the movable means of an interferometer is selected from:

at least one mirror, at least one corner cube mirror, at least one beam splitter, and at least one semi-transparent mirror.

11. The method according to claim 1, wherein the movement of the movable means relative to the interferometer body:

is 10 μ

m or more; and

at a rate of at least 1 movement per second.

12. The method according to claim 1, wherein the velocity of the movable means relative to the interferometer body is at 0.1 mm/s or more.

13. The method according to claim 1, wherein:

the velocity of the movable means relative to the interferometer body is constant;

or

the velocity of the movable means relative to the interferometer body is variable.

14. The method according to claim 1, wherein the at least one interferometer actuator has a harmonic frequency of 100 Hz or more.

15. The method according to claim 1, wherein:

actuation applied to at least three interferometer actuators differs in time, the result of such different actuation; and

the difference in actuation in time is determined by monitoring an interference signal.

16. The method according to claim 1, where the size of the at least one interferometer actuator in the direction substantially parallel to stroke length is 4 mm or less.

17. The method according to claim 1, wherein the size of the at least one interferometer actuator in the direction substantially perpendicular to the movement of the movable means is:

30 mm or more;

or

100 mm or less.

18. The method according to claim 1, wherein the weight of the movable means and interferometer actuator is less than 40 grams.

19. The method according to claim 1, wherein the at least three interferometer actuators are operated individually so that:

each actuator is activated through an independent signal;

or

said three or more actuators are fed a substantially identical main signal and at least one of the actuators is also fed a control signal.

20. A system for the movement of at least one movable means of an interferometer relative to the body of the interferometer, comprising:

at least three interferometer piezoelectric actuators, wherein said at least three interferometer piezoelectric actuators are arranged to be operated individually, so that the at least three piezoelectric actuators are capable of moving the at least one movable means of the interferometer;

a means for activating at least one of the at least three interferometer piezoelectric actuators to operate in parallel, thereby moving the at least one movable means of the interferometer with a stroke length of at least 10 μ

m; and

means for activating at least one other of the at least three interferometer piezoelectric actuators to control the tilt of the at least one movable means.

21. A system according to claim 20, wherein the at least three interferometer actuators that are arranged to be operated individually comprises:

at least one piezoelectric bender; and

/or

at least one linear piezoelectric actuator.

22. A system according to claim 21, wherein:

the movement of the at least one movable means of an interferometer is provided by at least three piezoelectric benders in a bender arrangement, where the at least three piezoelectric benders in the bender arrangement are operated in same manner; and

the length of the movement of the at least one movable means of the interferometer relative to the body of the interferometer is equal to the stroke length of the at least one piezoelectric bender in the bender arrangement.

23. A system according to claim 22, where the at least three piezoelectric bender elements are arranged on the same bender support to form a segmented bender.