Please download the dossier by clicking on the dossier button x
×

Interferometer actuator

  • US 8,259,300 B2
  • Filed: 04/21/2008
  • Issued: 09/04/2012
  • Est. Priority Date: 04/18/2007
  • Status: Active Grant
First Claim
Patent Images

1. A method for the movement of at least one movable means of an interferometer relative to the body of the interferometer, comprising:

  • arranging at least three interferometer piezoelectric actuators, wherein said at least three interferometer piezoelectric actuators are arranged to be operated individually, so that the at least three piezoelectric actuators are capable of moving the at least one movable means of the interferometer;

    activating at least one of the at least three interferometer piezoelectric actuators to operate in parallel, thereby moving the at least one movable means of the interferometer with a stroke length of at least 10 μ

    m; and

    activating at least one other of the at least three interferometer piezoelectric actuators to control the tilt of the at least one movable means.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×