Rotational speed sensor having a coupling bar
First Claim
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1. A rotational speed sensor comprising:
- at least one substrate having a base area oriented parallel to an x-y plane of a Cartesian coordinate system,at least two base elements each having a frame, a means for suspending the frame from the at least one substrate, at least one seismic mass and a means for suspending the seismic mass from the frame,at least one drive means for driving at least one base element and at least one reading device, wherein the at least one reading device is connected to the at least one substrate for sensing deflections of the seismic masses and/or the frames, andat least one coupling bar for coupling the at least two base elements, wherein the coupling bar includes two ends, and each end of the coupling bar is coupled to one or more of the seismic masses, either directly or by one or more spring elements, to suppress translatory deflections of the seismic masses in the same direction in at least one reading mode.
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Abstract
A rotational speed sensor including at least one substrate, at least two base elements which each have a frame, a means for suspending the frame from the substrate, at least one seismic mass and one means for suspending the seismic mass from the frame. One or more drive means are provided for driving one or more base elements and one or more reading devices. The at least two base elements are coupled to one another by means of at least one coupling bar.
47 Citations
20 Claims
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1. A rotational speed sensor comprising:
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at least one substrate having a base area oriented parallel to an x-y plane of a Cartesian coordinate system, at least two base elements each having a frame, a means for suspending the frame from the at least one substrate, at least one seismic mass and a means for suspending the seismic mass from the frame, at least one drive means for driving at least one base element and at least one reading device, wherein the at least one reading device is connected to the at least one substrate for sensing deflections of the seismic masses and/or the frames, and at least one coupling bar for coupling the at least two base elements, wherein the coupling bar includes two ends, and each end of the coupling bar is coupled to one or more of the seismic masses, either directly or by one or more spring elements, to suppress translatory deflections of the seismic masses in the same direction in at least one reading mode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13, 14, 15, 16, 17, 18, 19, 20)
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12. The rotational speed sensor as claimed in 1, wherein a sensed rotational speed can be determined from a difference signal of the at least one reading device and another reading device which are each assigned to respective seismic masses of a base element, and from the difference signal of the reading devices that are assigned to different base elements.
Specification