Formation of deep hollow areas and use thereof in the production of an optical recording medium

• US 8,263,317 B2
• Filed: 12/04/2007
• Issued: 09/11/2012
• Est. Priority Date: 12/08/2006
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Fargeix, Alain, Martin, Brigitte
• Primary Examiner(s): Angebranndt, Martin
• Application Number:
  US12/312,925
• Publication Number:
  US 20100059477A1
• Time in Patent Office: 1,743 Days
• Field of Search: None
• US Class Current: 430/321
• CPC Class Codes: G11B 7/261 Preparing a master, e.g. exposing photoresist, electroforming

Abstract

At least one hollow zone is formed in a stack of at least one upper layer and one lower layer. The upper layer is patterned to form at least a first hollow region passing through said upper layer. The first hollow region is extended by a second hollow region formed in the lower layer by etching through an etching mask formed on the patterned upper layer. The etching mask is formed by a resin layer, positively photosensitive to an optic radiation of a predetermined wavelength, exposed to the said optic radiation through the stack and developed. The lower and upper layers of the stack are respectively transparent and opaque to said predetermined wavelength so that the patterned upper layer acts as exposure mask for the resin layer.

Claims

1. A method for forming at least one hollow zone in a stack of at least one upper layer and one lower layer, comprising the following successive steps:

patterning of the upper layer to form at least a first hollow region passing through the upper layer,

forming an etching mask on the patterned upper layer, consisting of;

depositing a layer of a positive acting photosensitive resin and exposing it to an optic radiation of a predetermined first wavelength, on the patterned upper layer, the lower and upper layers of the stack being respectively transparent and opaque to the predetermined first wavelength, in exposing the positive acting photosensitive resin layer to the optic radiation through the stack,

developing the positive acting photosensitive resin layer,

etching the lower layer through the etching mask to form at least a second hollow region extending the first hollow region,

and removing the etching mask,

wherein, before the step of patterning the upper layer, the upper layer is formed of a material able to change phase or to change state, due to the action of heating caused by an optic radiation of a predetermined second wavelength different from the first wavelength.

2. The method according to claim 1, wherein the first hollow region is formed by exposing at least one area of the upper layer to an optic radiation of the second wavelength, from the free surface of the upper layer, and by removing the exposed area.

3. The method according to claim 1, wherein the material of the upper layer is selected from the group consisting of thermodynamically stable sub-stoichiometric oxides, thermodynamically unstable super-stoichiometric oxides and phase-change materials.

4. The method according to claim 1, wherein the second wavelength is 405 nm.

5. The method according to claim 1, wherein the first wavelength is 193 nm.

6. The method according to claim 1, wherein the stack comprises a substrate transparent to the first wavelength.

7. The method according to claim 6, wherein the substrate constitutes the lower layer.

8. The method according to claim 7, wherein the substrate is made from silicon oxide, alumina, zircon, sapphire or quartz.

9. The method according to claim 6, wherein the lower layer is arranged between the upper layer and the substrate.

10. The method according to claim 9, wherein the lower layer is a thin layer of alumina or of a mixture of zinc sulfide and silicon oxide or silicon nitride.

11. The method according to claim 9, wherein an additional layer, transparent to the first wavelength and insensitive to etching of the lower layer, is arranged between the lower layer and the substrate.

12. A method for manufacturing an optic recording medium in which at least one hollow zone is formed in a stack of at least one upper layer and one lower layer, the method comprising the following successive steps:

patterning of the upper layer to form at least a first hollow region passing through the upper layer,

forming an etching mask on the patterned upper layer, consisting of;

depositing a layer of a positive acting photosensitive resin and exposing it to an optic radiation of a predetermined first wavelength, on the patterned upper layer, the lower and upper layers of the stack being respectively transparent and opaque to the predetermined first wavelength, in exposing the positive acting photosensitive resin layer to the optic radiation through the stack,

developing the resin positive acting photosensitive layer,

etching the lower layer through the etching mask to form at least a second hollow region extending the first hollow region,

and removing the etching mask,

wherein, before the step of patterning the upper layer, the upper layer is formed of a material able to change phase or to change state, due to the action of heating caused by an optic radiation of a predetermined second wavelength different from the first wavelength.