Methods for mastering microstructures through a substrate using negative photoresist
First Claim
Patent Images
1. A method of fabricating an array of microstructures comprising:
- scanning a radiation beam at varying amplitude through a substrate that is transparent thereto into a negative photoresist layer on the substrate to image the array of microstructures in the negative photoresist layer.
5 Assignments
0 Petitions
Accused Products
Abstract
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
-
Citations
17 Claims
-
1. A method of fabricating an array of microstructures comprising:
scanning a radiation beam at varying amplitude through a substrate that is transparent thereto into a negative photoresist layer on the substrate to image the array of microstructures in the negative photoresist layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
Specification