CMOS photogate 3D camera system having improved charge sensing cell and pixel geometry

• US 8,264,581 B2
• Filed: 07/17/2009
• Issued: 09/11/2012
• Est. Priority Date: 07/17/2008
• Status: Active Grant

• Current Assignee: Microsoft Technology Licensing LLC (Microsoft Corporation)
• Original Assignee: Microsoft International Holdings BV (Microsoft Corporation)
• Inventors: Cohen, David, Shacham, Amit
• Primary Examiner(s): Hernández Hernández, Nelson D.
• Assistant Examiner(s): Hogue, Dennis
• Application Number:
  US12/504,687
• Publication Number:
  US 20100039546A1
• Time in Patent Office: 1,152 Days
• Field of Search: 348/207.99, 348/294, 348/301, 348/302, 348/307, 348/308, 257/291, 257/292, 257/315, 250/208.1, 600/448
• US Class Current: 348/308
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes

Abstract

A photosurface for receiving and registering light from a scene, the photosurface comprising: a first semiconductor region in which electron-hole pairs are generated responsive to light incident on the photosurface; a single, first conductive region substantially overlaying all of the first semiconductor region; at least one second semiconductor region surrounded by the first semiconductor region; a different second conductive region for each second semiconductor region that surrounds the second semiconductor region and is electrically isolated from the first conductive region; wherein when the second conductive region is electrified positive with respect to the first conductive region, electrons generated by light incident on the first semiconductor region are collected in the second semiconductor region.

Claims

1. A photosurface for receiving and registering light from a scene, the photosurface comprising:

a first semiconductor region in which electron-hole pairs are generated responsive to light incident on the photosurface;

a single, first conductive region substantially overlaying all of the first semiconductor region;

a plurality of second semiconductor regions, each surrounded by the first semiconductor region;

a plurality of second conductive regions, each second conductive region surrounds an associated one of the second semiconductor regions and is electrically isolated from the first conductive region, each second conductive region has an opening, the associated second semiconductor region completely fills the opening;

wherein when a respective one of the second conductive regions is electrified positive with respect to the first conductive region, electrons generated by light incident on the first semiconductor region are collected in the respective second semiconductor region, wherein electrons generated by light incident on the first semiconductor region migrate to the respective second semiconductor region from substantially all azimuthal directions relative to the second semiconductor region.

2. A photosurface according to claim 1 wherein the second semiconductor regions have a characteristic radial extent of about 0.6 microns.

3. A photosurface according to claim 1 wherein the second semiconductor regions have a characteristic radial extent of about 0.4 microns.

4. A photosurface according to claim 1 wherein the second semiconductor regions have a characteristic radial extent of about 0.3 microns.

5. A photosurface according to claim 1 wherein a distance between two nearest second semiconductor regions is less than or equal to about 9 microns.

6. A photosurface according to claim 1 wherein a distance between two nearest second semiconductor regions is less than or equal to about 6 microns.

7. A photosurface according to claim 1 wherein a distance between two nearest second semiconductor regions is less than or equal to about 4 microns.

8. A photosurface according to claim 1 wherein at least two of the plurality of second semiconductor regions are electrically connected by a conductor.

9. A photosurface according to claim 8 and comprising a circuit electrically connected to the plurality of second semiconductor regions configured to generate a signal responsive to a total number of electrons that migrate to the plurality of second semiconductor regions.

10. A photosurface according to any claim 1 and having a fill factor equal to or greater than about 40%.

11. A photosurface according to claim 1 and having a fill factor equal to or greater than about 50%.

12. A photosurface according to claim 1 and having a fill factor equal to or greater than about 60%.

13. A photosurface according to claim 1 and having a fill factor equal to or greater than about 75%.

14. A photosurface according to claim 1 wherein the at least one second semiconductor region comprises a floating diffusion.

15. A photosurface for imaging a scene comprising:

a light sensitive region in which electron-hole pairs are generated responsive to light incident on the photosurface;

a single photogate overlaying the light sensitive region;

a plurality of charge collecting regions, each of which is surrounded by the light sensitive region and in which charge generated in the light sensitive region is stored; and

for each of the charge collecting regions, a transfer gate that completely surrounds the charge collecting region, each transfer gate has an opening, the respective charge collecting region completely fills the opening, each transfer gate transfers charge from the light sensitive region to the charge collecting region within the opening of the respective transfer gate.

16. A photosurface according to claim 15 having a fill factor equal to or greater than about 40%.

17. A CMOS-type light detector cell comprising:

a photogate;

a channel implant in a structure underlying the photogate;

a plurality of floating diffusions formed within the channel implant; and

a plurality of transfer gates, each transfer gate completely surrounds an associated one of the floating diffusions and is operable to permit electrons accumulated under the photogate to travel through the channel implant to the associated floating diffusion,

wherein the photogate is a substantially continuous body extending over the channel implant, and includes a plurality of separate openings each of which surrounds one of the floating diffusions and its associated transfer gate, each of the transfer gates and its associated opening are aligned as concentric rings or a multi-sided shapes, each transfer gate having an inner opening with the associated floating diffusion positioned below and completely filling said inner opening.

18. The CMOS-type light detector cell of claim 17, wherein each transfer gate and associated opening are aligned as concentric circular rings, wherein said light detector cell includes a plurality of separate concentric circular rings.

19. The CMOS-type light detector cell of claim 17, wherein each transfer gate and associated opening are aligned as octagonal rings, wherein said light detector cell includes a plurality of separate concentric octagonal rings.

20. The CMOS-type light detector cell of claim 17, wherein a first of the transfer gates and its associated floating diffusion form a charge sensing element, a second of the transfer gates and its associated floating diffusion form a charge draining element.