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Method of fabricating microfluidic structures for biomedical applications

  • US 8,266,791 B2
  • Filed: 09/19/2008
  • Issued: 09/18/2012
  • Est. Priority Date: 09/19/2007
  • Status: Active Grant
First Claim
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1. A method for fabricating a microfluidic structure, comprising:

  • (a) providing a patterned wafer comprising at least one exposed electrically conductive region and at least one exposed electrically insulating region;

    (b) electroplating an inverse channel portion with substantially semicircular cross section onto the wafer, thereby forming a first master mold;

    (c) employing the first master mold so as to emboss a channel portion in a first polymer sheet;

    (d) aligning and bonding the first polymer sheet with a second polymer sheet having a corresponding channel portion such as to define a first channel with substantially circular cross section between the polymer sheets.

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