Alignment assembly

• US 8,267,388 B2
• Filed: 09/12/2007
• Issued: 09/18/2012
• Est. Priority Date: 09/12/2007
• Status: Active Grant

• Current Assignee: Carl Zeiss X-ray Microscopy, Inc. (Carl-Zeiss-Stiftung)
• Original Assignee: Xradia, Inc. (Carl-Zeiss-Stiftung)
• Inventors: Xu, Ying
• Primary Examiner(s): Wilson, Lee D
• Assistant Examiner(s): GRANT, ALVIN J
• Application Number:
  US11/853,901
• Publication Number:
  US 20090067976A1
• Time in Patent Office: 1,833 Days
• Field of Search: 269/60, 269/37, 269/64, 269/63, 269/71, 269/243, 269/246, 834/713, 834/772, 834/35, 83/27, 403/381
• US Class Current: 269/60
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: Y10T 83/7697 Tool angularly adjustable relative to work-support
• CPC Class Codes: Y10T 83/773 Work-support includes passageway for tool [e.g., slotted table]

Abstract

Alignment assembly is used to center a sample on a moving stage system. The alignment assembly includes a pair of slides stacked on a stage with linear perpendicular movement relative to each other, and at least one actuator that is preferably physically separate from the linear slides and stage. The actuator(s) repeatedly extend an actuator arm to move the linear slides, and retract the arm for subsequent movement of the stage during and after the process of centering the sample in two dimensions on the stage. Either the stage system rotates, or multiple actuators are placed to move the alignment system in perpendicular directions relative to the stage, by repeatedly contacting only the top linear slide.

Claims

1. A method for aligning a sample on an alignment assembly that resides on a rotation stage, to an axis of rotation of the rotation stage, using an actuator to move the alignment assembly, the alignment assembly comprising two orthogonal linear slides and an external measurement device to measure a location of the sample, the method comprising:

(a) rotating the rotation stage until a direction of movement of the alignment assembly is parallel to the movement of the actuator,

(b) measuring the location of the sample,

(c) successively rotating the rotation stage 90 degrees until the sample is as closest to the actuator as possible,

(d) pushing the at least one of the linear slides with the actuator until the sample is the same distance from the actuator as the center of rotation, and

(e) repeating steps (c) and (d).

2. A method for aligning a sample on an alignment assembly that resides on a rotation stage, to an axis of rotation of the rotation stage, using an actuator to move the alignment assembly, the alignment assembly comprising two mutually orthogonal linear slides that are orthogonal to the axis of rotation of the rotation stage, the method comprising:

rotating the rotation stage until a first direction of movement of the alignment assembly is parallel to movement of the actuator,

measuring the location of the sample,

positioning the sample relative to the axis of rotation of the rotation stage by the actuator moving the alignment assembly in the first direction,

rotating the rotation stage until a second direction of movement of the alignment assembly is parallel to the movement of the actuator, and

positioning the sample relative to the axis of rotation of the rotation stage by the actuator moving the alignment assembly in the second direction.

3. The method as claimed in claim 2, wherein the alignment assembly comprises a bottom linear slide on top of the rotation stage that is limited to move in the first direction and a top linear slide on top of the bottom linear slide which is limited to move in the second direction.

4. The method as claimed in claim 2, wherein the alignment assembly comprises a measurement device that is physically separate from the rotation stage for measuring a position of the sample.

5. The method as claimed in claim 2, wherein the actuator comprises at least one extending arm that engages the alignment assembly.

6. The method as claimed in claim 5, wherein the step of positioning the sample relative to the axis of rotation of the rotation stage by the actuator moving the alignment assembly comprises the actuator arm pushing on the alignment assembly.

7. The method as claimed in claim 2, wherein the orthogonal linear slides of the alignment assembly further comprise a top linear slide and a bottom linear slide that are magnetically loaded against each other to maintain their relative positions.