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Movable body drive method and apparatus, exposure method and apparatus, pattern formation method and apparatus, and device manufacturing method

  • US 8,269,945 B2
  • Filed: 12/24/2008
  • Issued: 09/18/2012
  • Est. Priority Date: 12/28/2007
  • Status: Expired due to Fees
First Claim
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1. A movable body drive method of driving a movable body within a predetermined plane, the method comprising:

  • a process of driving the movable body based on a result obtained by measuring a position of the movable body using a position measuring system that comprises a head that irradiates a measurement surface with a measurement beam, the measurement surface being installed on one of the movable body and an external of the movable body, and the head being installed on the other of the movable body and the external of the movable body; and

    a process of adjusting an irradiation amount of the measurement beam onto the measurement surface so that an accumulated amount of heat on the measurement surface does not exceed a predetermined level.

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