Beam intensity detection in a cavity ring down sensor

• US 8,269,972 B2
• Filed: 06/29/2010
• Issued: 09/18/2012
• Est. Priority Date: 06/29/2010
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cole, Barrett E., Marta, Terry
• Primary Examiner(s): Nguyen, Tu
• Application Number:
  US12/826,095
• Publication Number:
  US 20110317165A1
• Time in Patent Office: 812 Days
• Field of Search: None
• US Class Current: 356/437
• CPC Class Codes: G01N 2021/391 Intracavity sample
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 21/39 using tunable lasers

Abstract

A cavity ring down gas sensor may include a radiation source emits an input beam of light having a wavelength corresponding to an absorption line of a gas to be detected. The input beam of light is coupled into an optical cavity to amplify an internal beam of light that is reflected about the optical cavity. An optical element is disposed in the optical cavity at an angle close to, but not at, the Brewster'"'"'s angle to reflect a relatively small portion of the internal beam of light to a detector. When a specified light intensity is reached in the optical cavity, the input beam of light may be prevented from entering the optical cavity, and a cavity ring down time decay may be measured. The cavity ring down time decay may be related to the gas concentration of a gas to be detected in the optical cavity.

Claims

1. A gas sensor comprising:

an electromagnetic radiation source configured to emit an input beam of light;

an optical cavity for receiving a gas to be detected, the optical cavity defined by one or more optical segments separating at least two mirrors, wherein the at least two mirrors are configured to reflect an internal beam of light through the one or more optical segments;

an optical element disposed in at least one of the one or more optical segments, wherein the optical element is configured to reflect a portion of the internal beam of light when the input beam of light emitted by the electromagnetic radiation source is selectively allowed to enter the optical cavity;

a first detector positioned to detect the portion of the internal beam of light reflected by the optical element, wherein the first detector is configured to produce a signal that is related to the intensity of the internal beam of light present in the optical cavity; and

a controller coupled to the first detector, the controller is configured to receive the signal from the first detector and, when the controller determines that the intensity of the internal beam of light in the optical cavity has reached a threshold level, the controller is configured to cause the input beam of light emitted from the electromagnetic radiation source to be prevented from entering the optical cavity.

2. The gas sensor of claim 1 further comprising:

a beam control element for selectively allowing the input beam of light emitted by the electromagnetic radiation source to enter the optical cavity, and for selectively preventing the input beam of light emitted by the electromagnetic radiation source from entering the optical cavity; and

wherein the controller is coupled to the beam control element, and the controller is configured to cause the input beam of light emitted from the electromagnetic radiation source to be prevented from entering the optical cavity by causing the beam control element to prevent the input beam of light emitted from the electromagnetic radiation source from entering the optical cavity.

3. The gas sensor of claim 2 further comprising a second detector, wherein the second detector is configured to detect a cavity ring down time of the internal beam of light in the optical cavity after the controller causes the beam control element to prevent the input beam of light emitted from the electromagnetic radiation source from entering the optical cavity, wherein the cavity ring down time is related to a concentration of the gas to be detected in the optical cavity.

4. The gas sensor of claim 1 wherein the optical element is positioned in at least one of the optical segments of the optical cavity, and just off the Brewster'"'"'s angle of internal beam of light.

5. The gas sensor of claim 1 wherein the optical element is positioned in at least one of the optical segments of the optical cavity such that the optical element provides a cavity loss of 10 parts per million or less.

6. The gas sensor of claim 1 wherein the optical element is positioned in at least one of the optical segments of the optical cavity such that the optical element provides a cavity loss of 2 parts per million or less.

7. The gas sensor of claim 1 wherein the optical element includes a membrane disposed over a substrate including a through-hole.

8. The gas sensor of claim 1 wherein the optical element is configured to have substantially no internal absorption of the internal beam of light.

9. The gas sensor of claim 1 wherein the internal beam of light is tuned to an absorption line of the gas to be detected.

10. The gas sensor of claim 1 wherein at least one of the at least two mirrors is actuatable to move in and out of a node position that provides a resonance in the optical cavity.

11. The gas sensor of claim 10 wherein the actuatable mirror is electrically deformable.

12. The gas sensor of claim 11 wherein the electrically deformable mirror deforms around the node position according to an applied electrical potential.

13. A gas sensor comprising:

an electromagnetic radiation source configured to emit an input beam of light having a wavelength corresponding to an absorption wavelength of a gas to be detected;

an optical cavity including at least three mirrors separated by one or more optical segments, wherein the at least three mirrors are configured to reflect an internal beam of light through the one or more optical segments, wherein one of the at least three mirrors couples the input beam of light into the optical cavity;

an optical element disposed in at least one of the one or more optical segments, the optical element configured to reflect a portion of the internal beam of light in the optical cavity;

a first detector configured to detect the portion of the internal beam of light reflected by the optical element and produce a signal that is related to the intensity of the internal beam of light in the optical cavity;

a second detector for detecting a cavity ring down time of the internal beam of light in the optical cavity; and

a controller for configured to receive the signal from the first detector and, when the controller determines that the intensity of the internal beam of light in the optical cavity has reached a threshold level, the controller is configured to cause the electromagnetic radiation source to stop providing the input beam of light.

14. The gas sensor of claim 13 wherein the electromagnetic radiation source includes an acousto-optic modulator configured to selectively direct the beam of light into the optical cavity.

15. The gas sensor of claim 13 wherein the optical element is positioned in at least one of the optical segments of the optical cavity such that optical element provides a cavity loss of 4 parts per million or less.

16. The gas sensor of claim 13 wherein the optical element is positioned in at least one of the optical segments such that the optical element provides a cavity loss of 2 parts per million or less.

17. A method of detecting a gas, the method comprising:

transmitting an input beam of light from an electromagnetic radiation source into an optical cavity, wherein the optical cavity includes the at least two mirrors separated by one or more optical segments, and wherein the at least two mirrors reflect an internal beam of light around the optical cavity, the input beam of light having a wavelength that corresponds to an absorption line of a gas to be detected and contributes to the internal beam of light;

reflecting a portion of the internal beam of light off an optical element in the optical cavity;

determining a measure related to the intensity of the internal beam of light in the optical cavity from the reflected portion of the internal beam of light; and

stopping the input beam of light from entering the optical cavity and contributing to the internal beam of light when the measure related to the intensity of the internal beam of light in the optical cavity indicates that the intensity of the internal beam of light in the optical cavity has reached a threshold intensity.

18. The method of claim 17 further comprising detecting a cavity ring down time of the internal beam of light in the optical cavity after the stopping step to determine a measure related to a concentration of the gas to be detected in the optical cavity.

19. The gas sensor of claim 17 wherein the optical element is positioned in at least one of the optical segments of the optical cavity such that the optical element provides a cavity loss of 4 parts per million or less.

20. The gas sensor of claim 17 wherein the optical element is positioned in at least one of the optical segments of the optical cavity such that the optical element provides a cavity loss of 2 parts per million or less.