Gyroscope utilizing MEMS and optical sensing

• US 8,269,976 B2
• Filed: 04/29/2010
• Issued: 09/18/2012
• Est. Priority Date: 05/01/2009
• Status: Active Grant

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford Management Co.)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford Management Co.)
• Inventors: Kilic, Onur, Digonnet, Michel J. F., Kino, Gordon S., Solgaard, Olav
• Primary Examiner(s): Lyons, Michael A
• Application Number:
  US12/770,545
• Publication Number:
  US 20100309474A1
• Time in Patent Office: 873 Days
• Field of Search: 356/460, 356/480, 356/482, 735/040.1, 735/040.2
• US Class Current: 356/460
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: Y10T 29/49609 Spring making

Abstract

A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. In certain embodiments, the gyroscope is a microelectromechanical system (MEMS) gyroscope.

Claims

1. A gyroscope comprising:

a structure configured to be driven to move about a drive axis, the structure further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; and

an optical sensor system configured to optically measure movement of the structure about the sense axis, wherein the optical sensor system is configured to irradiate at least a portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the portion of the structure to optically measure the movement of the structure about the sense axis.

2. The gyro scope of claim 1, wherein the gyro scope is a microelectromechanical system (MEMS) gyroscope.

3. The gyroscope of claim 1, wherein the structure comprises a generally planar portion, at least one first torsional spring extending generally along the drive axis and operationally coupling the generally planar portion to a support structure, and at least one second torsional spring extending generally along the sense axis and operationally coupling the generally planar portion to the support structure.

4. The gyroscope of claim 3, wherein the generally planar portion comprises at least two drive arms extending in opposite directions from one another generally along the sense axis, wherein the at least second drive torsional spring operationally couples the at least two drive arms to the support structure.

5. The gyroscope of claim 3, wherein the generally planar portion comprises at least two sense arms extending in opposite directions from one another generally along the drive axis, wherein the at least one first torsional spring operationally couples the at least two sense arms to the support structure.

6. The gyroscope of claim 3, wherein the structure comprises a post portion extending generally perpendicularly away from the generally planar portion.

7. The gyroscope of claim 1, wherein the rotational axis is substantially perpendicular to at least one of the drive axis and the sense axis.

8. The gyroscope of claim 1, wherein the optical sensor system comprises one or more optical fibers configured to irradiate the at least a portion of the structure with the electromagnetic radiation and to receive the reflected electromagnetic radiation from the portion of the structure.

9. The gyroscope of claim 8, wherein the one or more optical fibers and the portion of the structure form at least one Fabry-Perot cavity therebetween.

10. The gyroscope of claim 8, wherein the optical sensor system further comprises one or more optical detectors in optical communication with the one or more optical fibers, the one or more optical detectors configured to receive the electromagnetic radiation reflected from the portion of the structure and transmitted by the one or more optical fibers and to generate one or more signals in response to the received electromagnetic radiation.

11. The gyroscope of claim 8, wherein the portion of the structure comprises one or more photonic-crystal structures.

12. The gyroscope of claim 1, further comprising a drive system configured to drive the structure to oscillate about the drive axis.

13. The gyroscope of claim 12, wherein the drive system comprises one or more optical fibers configured to irradiate at least a portion of the structure with electromagnetic radiation having sufficient radiation pressure to drive the structure to oscillate about the drive axis.

14. The gyroscope of claim 13, wherein the one or more optical fibers and the portion of the structure form at least one Fabry-Perot cavity therebetween.

15. The gyroscope of claim 12, wherein the drive system comprises one or more electrodes configured to apply sufficient electrostatic force on at least a portion of the structure to drive the structure to oscillate about the drive axis.

16. A method of detecting rotation, the method comprising:

providing a structure configured to be driven to move about a drive axis and to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis;

driving the structure to move about the drive axis;

rotating the structure about the rotational axis while the structure moves about the drive axis; and

optically measuring movement of the structure about the sense axis, wherein optically measuring movement of the structure comprises irradiating at least a portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and receiving reflected electromagnetic radiation from the portion of the structure.

17. The method of claim 16, wherein the structure comprises a generally planar portion, at least one first torsional spring extending generally along the drive axis and operationally coupling the generally planar portion to a support structure, and at least one second torsional spring extending generally along the sense axis and operationally coupling the generally planar portion to the support structure.

18. The method of claim 17, wherein the generally planar portion comprises at least two drive arms extending in opposite directions from one another generally along the sense axis, wherein the at least one second torsional spring operationally couples the at least two drive arms to the support structure.

19. The method of claim 17, wherein the generally planar portion comprises at least two sense arms extending in opposite directions from one another generally along the drive axis, wherein the at least one first torsional spring operationally couples the at least two sense arms to the support structure.

20. The method of claim 17, wherein the structure comprises a post portion extending generally perpendicularly away from the generally planar portion.

21. The method of claim 16, wherein the structure is micromachined and comprises silicon, polysilicon, silica, or quartz.

22. The method of claim 16, wherein driving the structure comprises irradiating at least a portion of the structure with electromagnetic radiation having sufficient radiation pressure to drive the structure to oscillate about the drive axis.

23. The method of claim 16, wherein driving the structure comprises applying sufficient electrostatic force on at least a portion of the structure to drive the structure to oscillate about the drive axis.

24. The method of claim 16, wherein optically measuring movement of the structure further comprises detecting at least a portion of the received reflected electromagnetic radiation and generating one or more signals in response to the detected portion of the received reflected electromagnetic radiation.

25. A method of fabricating a gyroscope, the method comprising:

providing a structure configured to be driven to move about a drive axis, the structure further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis; and

providing an optical sensor system configured to optically measure movement of the structure about the sense axis, wherein the optical sensor system is configured to irradiate at least a portion of the structure with electromagnetic radiation in a direction of the movement about the sense axis and to receive reflected electromagnetic radiation from the portion of the structure to optically measure the movement of the structure about the sense axis.

26. The method of claim 25, further comprising:

operationally coupling a generally planar portion of the structure to a support structure by at least one first torsional spring extending generally along the drive axis; and

operationally coupling the generally planar portion of the structure to the support structure by at least one second torsional spring extending generally along the sense axis.

27. The method of claim 26, wherein the generally planar portion comprises at least two drive arms extending in opposite directions from one another generally along the sense axis, wherein the at least second drive torsional spring operationally couples the at least two drive arms to the support structure.

28. The method of claim 26, wherein the generally planar portion comprises at least two sense arms extending in opposite directions from one another generally along the drive axis, wherein the at least one first torsional spring operationally couples the at least two sense arms to the support structure.

29. The method of claim 25, wherein providing the optical sensor system comprises providing one or more optical fibers configured to irradiate the at least a portion of the structure with the electromagnetic radiation and to receive the reflected electromagnetic radiation from the portion of the structure.

30. The method of claim 29, wherein providing the optical sensor system comprises forming at least one Fabry-Perot cavity between the one or more optical fibers and the portion of the structure.

31. The method of claim 29, wherein providing the optical sensor system further comprises providing one or more optical detectors in optical communication with the one or more optical fibers, the one or more optical detectors configured to receive the electromagnetic radiation reflected from the portion of the structure and transmitted by the one or more optical fibers and to generate one or more signals in response to the received electromagnetic radiation.

32. The method of claim 25, further comprising providing a drive system configured to drive the structure to oscillate about the drive axis.

33. The method of claim 32, wherein providing the drive system comprises providing one or more optical fibers configured to irradiate at least a portion of the structure with electromagnetic radiation having sufficient radiation pressure to drive the structure to oscillate about the drive axis.

34. The method of claim 33, wherein providing the drive system comprises forming at least one Fabry-Perot cavity between the one or more optical fibers and the portion of the structure.

35. The method of claim 32, wherein providing the drive system comprises providing one or more electrodes configured to apply sufficient electrostatic force on at least a portion of the structure to drive the structure to oscillate about the drive axis.

36. The method of claim 25, further comprising centering a post portion extending generally perpendicularly away from the generally planar portion.

37. The method of claim 36, wherein centering the post portion comprises:

placing a sensor on the sense axis,

measuring a first noise spectrum having a first peak at a resonance frequency of a sense mode,

placing the sensor on the drive axis,

measuring a second noise spectrum having second peak at a resonance frequency of a drive mode, and

determining a position of the post portion on the structure where the first and second peaks are reduced.