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Electrostatic discharge protection element and electrostatic discharge protection chip and method of producing the same

  • US 8,270,131 B2
  • Filed: 07/31/2009
  • Issued: 09/18/2012
  • Est. Priority Date: 07/31/2009
  • Status: Active Grant
First Claim
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1. An electrostatic discharge (ESD) protection element comprising:

  • a collector area having a first conductivity type;

    a first barrier area bordering on the collector area, the first barrier area having a second conductivity type;

    a semiconductor area bordering on the first barrier area, the semiconductor area being an intrinsic semiconductor area, or a semiconductor area having the first or second conductivity type and a dopant concentration that is lower than a dopant concentration of the first barrier area;

    a second barrier area bordering on the semiconductor area, the second barrier area having the second conductivity type and a higher dopant concentration than the semiconductor area; and

    an emitter area bordering on the second barrier area, the emitter area having the first conductivity type;

    a third barrier area bordering on the semiconductor area, the third barrier area having the first conductivity type and a higher dopant concentration than the semiconductor area; and

    a base area bordering on the third barrier area, the base area having the second conductivity type,wherein the dopant concentration of the third barrier area is such that the third barrier area is more than 95% or fully depleted of charge carriers of the first conductivity type when no voltage is applied to the electrostatic discharge protection element,wherein the dopant concentrations of the first barrier area and of the second barrier area are such that the first barrier area and the second barrier area are more than 95% depleted of charge carriers of the second conductivity type when no voltage is applied to the electrostatic discharge protection element; and

    wherein the base area is connected to the emitter area via an electrical connection line.

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