Automated model building and model updating

• US 8,271,103 B2
• Filed: 05/01/2008
• Issued: 09/18/2012
• Est. Priority Date: 05/02/2007
• Status: Active Grant

• Current Assignee: MKS Instruments AB (Sartorius AG)
• Original Assignee: MKS Instruments Incorporated
• Inventors: Hendler, Lawrence, Lazarovich, Stela Diamant, Hadar, Ron, Levami, Uzi, Perlroizen, Dmitry, Kettaneh, Nouna
• Primary Examiner(s): Kasenge, Charles
• Assistant Examiner(s): DUNN, DARRIN D
• Application Number:
  US12/113,613
• Publication Number:
  US 20090037013A1
• Time in Patent Office: 1,601 Days
• Field of Search: 702/179, 702/183, 700/31, 700/103, 707/779, 707/804
• US Class Current: 700/31
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32201 Build statistical model of past normal proces, compare with actual process
• CPC Class Codes: G05B 2219/42001 Statistical process control spc
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers

Abstract

A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Claims

1. A multivariate analytical system comprising:

a processor;

a template-generating module in communication with the processor to generate a first template based on a previously-created model that includes a first set of parameters defining at least a portion of a manufacturing process;

a data acquisition module in communication with a processing tool to acquire or monitor one or more variables during the manufacturing process and provide information associated with the one or more variables to a model-generating module;

the model-generating module to generate a new model having a second set of parameters, the new model being generated according to a statistical analysis based on the first template and the one or more variables upon the one or more variables satisfying a threshold condition, wherein the one or more variables satisfy the threshold condition when the statistical analysis of the one or more variables results in a value that exceeds a threshold value; and

a basket or cache module to provide data to the model-generating module or the template-generating module in response to a user selection or the one or more variables satisfying the threshold condition.

2. The system of claim 1, wherein the one or more variables to be monitored are specified by a user.

3. The system of claim 1, wherein the threshold condition is specified by a user.

4. The system of claim 1, wherein any of the one or more variables satisfying the threshold condition triggers creating the new model.

5. The system of claim 1, wherein the one or more variables comprise time, occurrence of periodic or preventive maintenance, a result of metrology verification, a number of wafers processed, or any combination thereof.

6. The system of claim 1, wherein the multivariate statistical analysis involves a Hotelling-type calculation, a DModX-type calculation, a principal component analysis-type calculation, a weighted moving average-type calculation, or any combination thereof.

7. The system of claim 1, wherein the new model specifies parameters for a process tool, chamber, or recipe from which the one or more variables were monitored or for a second process tool, chamber, or recipe.

8. The system of claim 1, wherein the first set of parameters comprise metrology, time, duration of use of a process tool, number of wafers processed, occurrence of periodic or preventive maintenance, sequence of wafers processed, or any combination thereof.

9. The system of claim 1 wherein the statistical analysis is a multivariate statistical analysis.

10. The system of claim 9, wherein the multivariate statistical analysis involves a Hotelling-type calculation, a DModX-type calculation, a principal component analysis-type calculation, a weighted moving average-type calculation, or any combination thereof.

11. A multivariate analytical system comprising:

a processor;

a template-generating module in communication with the processor to generate a first template based on a previously-created model that includes a first set of parameters defining at least a portion of a manufacturing process;

a data acquisition module in communication with a processing tool to acquire or monitor one or more variables during the manufacturing process and provide information associated with the one or more variables to a model-generating module;

the model-generating module to generate a new model having a second set of parameters, the new model being generated according to a statistical analysis based on the first template and the one or more variables upon the one or more variables satisfying a threshold condition, wherein the one or more variables satisfy the threshold condition when the statistical analysis of the one or more variables results in a value that exceeds a threshold value, wherein the new model comprises the previously-created model and the second set of parameters comprises the values of the first set of parameters adjusted based on the template and the one or more variables.

12. A multivariate analytical system comprising:

a processor;

a template-generating module in communication with the processor to generate a first template based on a previously-created model that includes a first set of parameters defining at least a portion of a manufacturing process;

a data acquisition module in communication with a processing tool to acquire or monitor one or more variables during the manufacturing process and provide information associated with the one or more variables to a model-generating module;

the model-generating module to generate a new model having a second set of parameters, the new model being generated according to a statistical analysis based on the first template and the one or more variables upon the one or more variables satisfying a threshold condition, wherein the one or more variables satisfy the threshold condition when the statistical analysis of the one or more variables results in a value that exceeds a threshold value; and

a user interface including;

(a) a first area including one or more fields available for input of information by a user, the information corresponding to a value of a parameter of the template, and the first area including a command portion in communication with the template-generating module for, in response to the user selecting the command portion, issuing a command to create the template;

(b) a second area displaying one or more unique identifiers associated with each of a set of wafers having one or more data values, the one or more unique identifiers selectable by the user;

(c) a third area for displaying a subset of the one or more unique identifiers corresponding to a subset of wafers selected by the user;

(d) a fourth area in communication with the model-generating module for at least one of creating the new model or updating the previously-created model in response to the user selecting the fourth area, wherein the new model is created or the previously-created model is updated according to a statistical analysis based on the template and the one or more data values associated with the subset of wafers.

13. The system of claim 12, wherein the user interface further comprises:

(e) a fifth area having one or more conditions selectable by the user; and

an analyzer module in communication with the fifth area and the model-generating module for, upon determining that the one or more user-selectable conditions have been satisfied, communicating a signal to the model-generating module to create the new model or update the previously-created model.